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Deposition Systems for Compound Semiconductors

G10-SiC

150/200 mm High Throughput Epitaxy for SiC Power Electronics

Dual Wafer Size Batch Reactor

G10-SiC

  • 150 mm and 200 mm – dual wafer size capable – safeguard your investment into the future
  • Highest wafer output / m2 in the market
  • Lowest cost / wafer in the market
  • Excellent run-to-run process performance
  • Highly uniform, low defect SiC epitaxy processes for maximum chip yield
  • Efficient SiC substrate Basal Plane Dislocation (BPD) conversion

     

G10-SiC

Planetary Reactor® for 9 x 150 mm & 6 x 200 mm

Your benefits

  • Single wafer performance in batch configuration
  • Best in class productivity
  • Best in class epi cost

Our solutions

  • Fully automated wafer loading (C2C)
  • Individual wafer Gas Foil Rotation (GFR)
  • Automated Top side wafer Temperature Control (TTC) for optimized batch processing
  • Largest reactor capacity (9 x 150 mm & 6 x 200 mm)
  • High growth rate SiC processes
  • Hot wafer transfer and fast thermal reactor cycling
  • Best in class wafer throughput per m2 fab space efficacy
  • Low consumable cost per wafer
  • Highest efficiency in gas & power consumption per wafer

AIXTRON SiC application lab services

  • Operation of 4 systems for 150/200 mm SiC process development
  • Full material characterization capabilities supported by Fraunhofer Institute, Germany
  • Customer support through SiC process demonstration/developments and training

The best of both worlds

Single wafer performance at lowest batch processing costs

Thickness uniformity

Doping uniformity

Ihr Ansprechpartner

Marketing

Dr. Frank Wischmeyer

Vice President Silicon Carbide

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Phone: +49 2407 9030-844

Chanyoung Han
South Korea

Phone: +82 31 371 3023

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

Press & Public Relation

Guido Pickert
Vice President

Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Vice President Marketing

E-Mail senden

Spare parts

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Career

Laura Preinich
Recruiter

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Guido Pickert
Vice President

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Vincent Meric
Vice President Marketing

Career

Laura Preinich
Recruiter

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Company & Investor Relations

Guido Pickert
Vice President

Press & Public Relation

Guido Pickert
Vice President

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies