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TECHNOLOGIES
The MOCVD mass production systems are based on the Planetary Reactor concept, which is constantly being developed further by AIXTRON. The reactors can accommodate several substrates with diameters from 2 to 8 inches or 200 mm.
The Planetary Reactor ® is based on the principle of a horizontal laminar flow reactor. This ensures the sharpest transitions between different materials and incomparable control of the deposition rates in the area of individual atomic layers. The combination of this principle with the multiple rotation of substrate carriers ensures that the deposition takes place with excellent homogeneity regarding layer thickness, composition and doping. In addition, the special reactor inlet, which allows the separation of some gases, ensures an even radial flow to the outside with an optimally adjustable distribution.
The reactors are inductively heated and can be equipped with various in-situ sensors.
Alan Tai
Taiwan/Singapore
Christof Sommerhalter
USA
Christian Geng
Europe
Hisatoshi Hagiwara
Japan
Nam Kyu Lee
South Korea
Wei (William) Song
China
Vincent Meric
Vice President Marketing
AIXTRON SE (Headquarters)
Phone: +49 (2407) 9030-0AIXTRON SE (R&D Center)
Phone: +49 (2407) 9030-222AIXTRON 24/7 Technical Support Line
Phone: +49 (2407) 9030-999AIXTRON Europe
Phone: +49 (2407) 9030-9037AIXTRON Ltd (UK)
Phone: +44 (1223) 519-444AIXTRON K.K. (Japan)
Phone: +81 3 5781 0931AIXTRON Korea Co., Ltd.
Phone: +82 (31) 371-3000AIXTRON Taiwan Co., Ltd. (Main Office)
Phone: +886 3 571 2678AIXTRON Inc. (USA)
Phone: +1 (669) 228-3759
Yun Ling
China
Satoshi Fujii
Japan
Brian Chuang
Taiwan/Singapore
Ersatzteile Europa
Europe
Chanyoung Han
South Korea
Colin Wong
USA
Laura Preinich
Recruiter
Christoph Pütz
Senior Manager ESG & Sustainability
Guido Pickert
Vice President
Guido Pickert
Vice President
Prof. Dr. Michael Heuken
Vice President Advanced Technologies
Alan Tai
Taiwan/Singapore
Christof Sommerhalter
USA
Christian Geng
Europe
Hisatoshi Hagiwara
Japan
Nam Kyu Lee
South Korea
Wei (William) Song
China
Vincent Meric
Vice President Marketing
Yun Ling
China
Satoshi Fujii
Japan
Brian Chuang
Taiwan/Singapore
Ersatzteile Europa
Europe
Chanyoung Han
South Korea
Colin Wong
USA
Laura Preinich
Recruiter
Christoph Pütz
Senior Manager ESG & Sustainability
Guido Pickert
Vice President
Guido Pickert
Vice President
Prof. Dr. Michael Heuken
Vice President Advanced Technologies
Alan Tai
Taiwan/Singapore
Christof Sommerhalter
USA
Christian Geng
Europe
Hisatoshi Hagiwara
Japan
Nam Kyu Lee
South Korea
Wei (William) Song
China
AIXTRON SE (Headquarters)
AIXTRON 24/7 Technical Support Line
AIXTRON Europe
AIXTRON Ltd (UK)
AIXTRON K.K. (Japan)
AIXTRON Korea Co., Ltd.
AIXTRON Taiwan Co., Ltd. (Main Office)
AIXTRON Inc. (USA)
Laura Preinich
Recruiter
Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung
Christoph Pütz
Senior Manager ESG & Sustainability
Prof. Dr. Michael Heuken
Vice President Advanced Technologies