TECHNOLOGIES

SiC Warm-wall planetary principle (SiC-CVD)

The warm-wall CVD systems are used for the production of wide-bandgap semiconductors, such as silicon carbide (SiC). Their process chambers deliver the very high deposition temperatures required for WBG semiconductors. In these systems, the concept of the planetary reactor is linked to the high-temperature process. With a configuration of up to 5x200mm wafers, these systems are among the largest commercial CVD production systems for silicon carbide (SiC) worldwide. In addition to unsurpassed production capacity, the effective use of raw materials is one of the decisive advantages.

The future will drive with silicon carbide

Silicon carbide (SiC) is a semiconductor material that is ideally suited for electrical applications at high power and frequencies. Fast, lossless SiC Schottky diodes provide efficient and compact solutions for switching power supplies that are already in use in computer servers. Power rectifier modules, which can be made lighter and more compact with the help of SiC rectifiers and transistors, show a promising potential for future use in hybrid or electric vehicles.

In this system, the horizontal hot-wall reactor is combined with the multiple rotation of the substrate carriers, the so-called Gas Foil Rotation (GFR). During the coating process, the rotation of the substrate carriers produces very homogeneous layers, which are required for modern high-performance components. With the patented transfer system, the reactor can be loaded and unloaded manually with the substrate carriers. On request, a second coating chamber offers more flexibility and a higher throughput of the system.

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Christof Sommerhalter
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Frank Schulte
Europe

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Hisatoshi Hagiwara
Japan

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Nam Kyu Lee
South Korea

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Wei (William) Song
China

Phone: +86 2164453226 ext. 101

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Dr. Jens Voigt
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Phone: +49 (0) 2407 9030-9022

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Phone: +81 3 5781 0932

Herr Brian Chuang
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Ersatzteile Europa
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Herr Chanyoung Han
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Phone: +82 31 371 3023

Herr Colin Wong
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Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

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Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

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Christof Sommerhalter
USA

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Frank Schulte
Europe

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Hisatoshi Hagiwara
Japan

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Nam Kyu Lee
South Korea

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Wei (William) Song
China

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Spare parts

Herr Yun Ling
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Herr Satoshi Fujii
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E-Mail senden

Herr Brian Chuang
Spare part

E-Mail senden

Ersatzteile Europa
Spare part

Herr Chanyoung Han
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E-Mail senden

Herr Colin Wong
Spare part

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON SE (R&D Center)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Dr. Jens Voigt
Director Product Management

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Research & Development

Prof. Dr. Michael Heuken
Vice President