TECHNOLOGIES

SiC Warm-wall planetary principle (SiC-CVD)

The warm-wall CVD systems are used for the production of wide-bandgap semiconductors, such as silicon carbide (SiC). Their process chambers deliver the very high deposition temperatures required for WBG semiconductors. In these systems, the concept of the planetary reactor is linked to the high-temperature process. With a configuration of up to 5x200mm wafers, these systems are among the largest commercial CVD production systems for silicon carbide (SiC) worldwide. In addition to unsurpassed production capacity, the effective use of raw materials is one of the decisive advantages.

The future will drive with silicon carbide

Silicon carbide (SiC) is a semiconductor material that is ideally suited for electrical applications at high power and frequencies. Fast, lossless SiC Schottky diodes provide efficient and compact solutions for switching power supplies that are already in use in computer servers. Power rectifier modules, which can be made lighter and more compact with the help of SiC rectifiers and transistors, show a promising potential for future use in hybrid or electric vehicles.

In this system, the horizontal hot-wall reactor is combined with the multiple rotation of the substrate carriers, the so-called Gas Foil Rotation (GFR). During the coating process, the rotation of the substrate carriers produces very homogeneous layers, which are required for modern high-performance components. With the patented transfer system, the reactor can be loaded and unloaded manually with the substrate carriers. On request, a second coating chamber offers more flexibility and a higher throughput of the system.

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Public Relations

Henning Marburger

Phone: +49 (2407) 9030 3665

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Careers

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Service

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

Spare Parts

USA: Herr Colin Wong

Phone: +1 669 228-3759

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

Phone: +81 3 5781 0932

South Korea: Herr Chanyoung Han

Phone: +82 31 371 3023

Taiwan: Herr Brian Chuang

Phone: +886 3 5712 678 Durchwahl 250

Investor Relations & Corporate Communications

Guido Pickert
Vice President

E-Mail senden

Public Relations

Henning Marburger

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Careers

Laura Preinich
Recruiter

E-Mail senden

Service

Spare Parts

USA: Herr Colin Wong

E-Mail senden

China: Herr Yun Ling

E-Mail senden

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

E-Mail senden

South Korea: Herr Chanyoung Han

E-Mail senden

Taiwan: Herr Brian Chuang

E-Mail senden

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Fax: +49 (2407) 9030-445

Public Relations

Henning Marburger

Fax: +49 (2407) 9030 445

Products

Dr. Jens Voigt
Director Product Management

Fax: +49 (0) 2407 9030-40

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Careers

Laura Preinich
Recruiter

Fax: +49 (2407) 9030 494

Service

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

Fax: +49 (2407) 9030-167

AIXTRON Inc. (USA)

AIXTRON K.K. (Japan)

Fax: +81 3 5781 0940

AIXTRON Korea Co., Ltd.

Fax: +82 (31) 371-3093

AIXTRON Ltd (UK)

Fax: +44 (1223) 519-888

AIXTRON SE (Headquarters)

Fax: +49 (2407) 9030-40

AIXTRON SE (R&D Center)

Fax: +49 (2407) 9030-8030

AIXTRON Taiwan Co., Ltd. (Main Office)

Fax: +886 3 571 2738