We are shaping the future. With innovation and precision.

Shaping the future requires a spirit of innovation. We are passionate about research and development – with attention to detail, and an understanding of the essentials.

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Our MOCVD systems work with a combination of the Planetary Reactor concept and a multiple rotation. This ensures the sharpest transitions between different materials and incomparable control of the deposition rates in the area of individual atomic layers - up to 1 nanometer thin.

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Compound Semiconductors

mocvd SYSTEMS

The MOCVD volume production systems are based on the planetary concept (Planetary Reactor).

The reactors can accommodate substrates from 2 to 8 inches (200 mm).

OVERVIEW
2D Nanotechnology

cvd & PECVD SYSTEMS

Applying this methodology, the deposition of thin films takes place by means of chemical reactions, in which the wafers are exposed to a gas mixture that reacts on the wafer surface.

OVERVIEW

Our business partners about us

"AIXTRON's AIX G5 + MOCVD plant meets all requirements while maintaining a cost-effective production operation due to its batch reactor concept."

Fariba Danesh, CEO of glō-USA, Inc.

References

Lumentum Holdings Inc.

Lumentum Holdings Inc. is a leading manufacturer of photonic semiconductor devices for communications, industrial and consumer applications. Our AIX 2800G4-TM supports Lumentum's excellent homogeneity control of the wafer surface, unique and advanced wafer-to-wafer temperature control capabilities such as AUTOSAT, and low raw material consumption.

All References

AIXTRON – system production with attention to detail

AIXTRON’s original pioneering spirit and high quality standards still prevail to this day. We specialize in cutting-edge technologies pertaining to the deposition of materials. Precision, diligence, and attention to detail are the top priorities at AIXTRON, ensuring that our customers receive optimum system and service quality they can rely on.

PRODUCT OVERVIEW
OUR SERVICE IS ALWAYS AVAILABLE
OUR SERVICE IS ALWAYS AVAILABLE

24/7 Customer service

Direct Contact to AIXTRON 24/7 Technical Support Line: +49 (2407) 9030-99

SERVICE CENTER
upgrades
upgrades

soft- & hardware upgrades

Would you like to update your system? Contact us.

UPGRADES
WORLD WIDE CUSTOMER service
WORLD WIDE CUSTOMER service

SPARE PARTS

Fully stocked spare parts warehouses around the world – for us, that’s a given. We deliver the required components quickly and reliably - worldwide.

SPARE PARTS
PRESS RELEASES

VPEC expands capacities with AIXTRON technology

Taiwanese epi foundry chooses AIXTRON MOCVD systems to meet growing demand for lasers and other devices

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SHARE PRICE TECDAX
investors infos
Career at AIXTRON

YOUR NEW JOB AT AIXTRON – JUST ONE CLICK AWAY.

Take the crucial step in your career now – become part of an international company leading the market with hightech-systems for the semiconductor industries and pioneering important future technologies. Be it for light-emitting diodes, solar cells, laser, flat screens or memory chips: You will be engaged with highly innovative products that drive a continuing course for growth. Your plus: room for development and best perspectives.

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CONTACT

We are happy to answer your questions.

Dornkaulstr. 2
52134 Herzogenrath
Germany
Telefon: +49 2407 9030 0
Telefax: +49 2407 9030 40
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