TECHNOLOGIES

Showerhead principle (MOCVD)

With Close Coupled Showerhead technology, the process-relevant gases are introduced into the reactor through the water-cooled showerhead surface across the entire coating surface. The distance between the showerhead and the substrates is very small. The gas inlet is designed so that the individual gases are separated by many narrow tubes up to just before the inlet. The gases are introduced into the reactor through separate openings in the water-cooled showerhead to achieve a very even distribution of the process gases.

The Close Coupled Showerhead (CCS) concept allows a variety of susceptor substrate configurations with a maximum capacity of 121x2, 31x4 or 12x6 inch wafers to be used for mass production of GaN components.

The substrates lie on a rotating susceptor, which is heated by a resistance heater. The temperature profile can be adjusted by separate heating zones so that the susceptor always has the same temperature on the entire surface.

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Alan Tai
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Christof Sommerhalter
USA

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Frank Schulte
Europe

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Hisatoshi Hagiwara
Japan

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Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

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Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

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AIXTRON SE (Headquarters)

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AIXTRON SE (R&D Center)

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Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Chanyoung Han
South Korea

Phone: +82 31 371 3023

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Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

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Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

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Rita Syre
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Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

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Christof Sommerhalter
USA

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Frank Schulte
Europe

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Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Director Marketing

E-Mail senden

Spare parts

Yun Ling
China

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Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

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Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Vincent Meric
Director Marketing

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Press & Public Relation

Rita Syre
Senior PR Manager

Research & Development

Prof. Dr. Michael Heuken
Vice President