DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

Closed Coupled Showerhead® CCS Systems for R&D

“Flexible MOCVD system for R&D and small scale production”

Key Benefits

  • Versatile R&D platform with integrated glovebox
    • True scaling from R&D to mass production
    • Inherently uniform and reproducible growth for all material systems
    • High flexibility in process window for excellent material quality and uniformity
  • Ideal for small R&D budgets: lowest running cost
    • Low gas flows and high precursor efficiency
    • Easy and low cost maintenance

Product Features

  • High flexibility for various MO and hydride sources
  • Digital mass flow controllers and pressure controllers
  • Professional AIXACT® Advanced Control System with HTML-based GUI
  • Compact footprint

CCS

  • Proven Close Coupled Showerhead® reactor with 3-zone heater
  • Dynamic process gap adjustment – effective process tuning for higher performance
  • 1400°C surface temperature option
  • In-situ monitoring with Laytec EpiTT, EpiCurveTT, and others on request
  • AIXTRON ARGUS full wafer temperature mapping
  • AIXTRON EPISON® gas concentration sensors Configurations (by simple carrier exchange):
    • 3x2 inch, 1x3 inch, 1x4 inch
    • 6x2 inch, 7x2 inch, 3x3 inch, 1x4 inch, 1x6 inch
    • 19x2 inch, 7x3 inch, 5x4 inch, 1x6 inch, 1x8 inch
       

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Your contact person

AIXTRON Ltd. UK

Dr. Andrew Pakes

Senior Product Manager

Phone: +44 1954 208 465

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

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Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

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Christian Geng
Europe

Phone: +49 (2407) 9030 -135

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Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

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Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

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Wei (William) Song
China

Phone: +86 2164453226 ext. 101

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Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

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Career

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

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Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

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Ralf Penner
Senior IR Manager

Phone: +49 (2407) 9030-6153

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Press & Public Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

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Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

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Spare Parts

Service/Kundendienst