DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS & NOVEL MATERIALS

Closed Coupled Showerhead® CCS and NOVO Systems for R&D

“Flexible MOCVD system for R&D and small scale production”

Key Benefits

  • Versatile R&D platform with integrated glovebox
    • True scaling from R&D to mass production
    • Inherently uniform and reproducible growth for all material systems
    • High flexibility in process window for excellent material quality and uniformity
  • Ideal for small R&D budgets: lowest running cost
    • Low gas flows and high precursor efficiency
    • Easy and low cost maintenance

Product Features

  • High flexibility for various MO and hydride sources
  • Digital mass flow controllers and pressure controllers
  • Professional AIXACT® Advanced Control System with HTML-based GUI
  • Compact footprint

CCS

  • Proven Close Coupled Showerhead® reactor with 3-zone heater
  • Dynamic process gap adjustment – effective process tuning for higher performance
  • 1400°C surface temperature option
  • In-situ monitoring with Laytec EpiTT, EpiCurveTT, and others on request
  • AIXTRON ARGUS full wafer temperature mapping
  • AIXTRON EPISON® gas concentration sensors Configurations (by simple carrier exchange):
    • 3x2 inch, 1x3 inch, 1x4 inch
    • 6x2 inch, 7x2 inch, 3x3 inch, 1x4 inch, 1x6 inch
    • 19x2 inch, 7x3 inch, 5x4 inch, 1x6 inch, 1x8 inch
       

NOVO

  • Cold wall thermal and plasma enhanced CVD showerhead reactor
  • Remote and substrate plasma
  • 1050°C surface temperature
  • Capacity for 1x4 inch wafer or small samples
  • Optional turbo pump for reactor
     

 

CCS / NOVO Systems for R&D

Your contact person

AIXTRON Ltd. UK

Dr. Andrew Pakes

Senior Product Manager

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Chanyoung Han
South Korea

Phone: +82 31 371 3023

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Director Marketing

E-Mail senden

Spare parts

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Vincent Meric
Director Marketing

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Press & Public Relation

Rita Syre
Senior PR Manager

Research & Development

Prof. Dr. Michael Heuken
Vice President