DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS & NOVEL MATERIALS

Closed Coupled Showerhead® CCS and NOVO Systems for R&D

“Flexible MOCVD system for R&D and small scale production”

Key Benefits

  • Versatile R&D platform with integrated glovebox
    • True scaling from R&D to mass production
    • Inherently uniform and reproducible growth for all material systems
    • High flexibility in process window for excellent material quality and uniformity
  • Ideal for small R&D budgets: lowest running cost
    • Low gas flows and high precursor efficiency
    • Easy and low cost maintenance

Product Features

  • High flexibility for various MO and hydride sources
  • Digital mass flow controllers and pressure controllers
  • Professional AIXACT® Advanced Control System with HTML-based GUI
  • Compact footprint

CCS

  • Proven Close Coupled Showerhead® reactor with 3-zone heater
  • Dynamic process gap adjustment – effective process tuning for higher performance
  • 1400°C surface temperature option
  • In-situ monitoring with Laytec EpiTT, EpiCurveTT, and others on request
  • AIXTRON ARGUS full wafer temperature mapping
  • AIXTRON EPISON® gas concentration sensors Configurations (by simple carrier exchange):
    • 3x2 inch, 1x3 inch, 1x4 inch
    • 6x2 inch, 7x2 inch, 3x3 inch, 1x4 inch, 1x6 inch
    • 19x2 inch, 7x3 inch, 5x4 inch, 1x6 inch, 1x8 inch
       

NOVO

  • Cold wall thermal and plasma enhanced CVD showerhead reactor
  • Remote and substrate plasma
  • 1050°C surface temperature
  • Capacity for 1x4 inch wafer or small samples
  • Optional turbo pump for reactor
     

 

CCS / NOVO Systems for R&D

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Your contact person

AIXTRON Ltd. UK

Dr. Andrew Pakes

Senior Product Manager

Phone: +44 1954 208 465

Fax: +44 1223 519 888

Send e-mail

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Yun Ling
China

Phone: +86 21 64453226 Durchwahl: 207

Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Phone: +49 2407 9030-844

Chanyoung Han
South Korea

Phone: +82 31 371 3023

Colin Wong
USA

Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Director Marketing

E-Mail senden

Spare parts

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

E-Mail senden

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

E-Mail senden

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

E-Mail senden

Spare Parts

Service/Kundendienst