TECHNOLOGIES

MOCVD

MOCVD (Metal-Organic Chemical Vapour Deposition) is a technology used to deposit ultra-thin, single crystal layers onto a semiconductor wafer. MOCVD is the most important manufacturing process for III-V compound semiconductors, especially those based on gallium nitride (GaN).

In the MOCVD process, a gas stream is passed over a heated wafer (typically at temperatures between 400°C - 1300°C depending on the material to be deposited). The gas flow contains so-called ‘precursors’, i.e. molecules such as trimethylgallium and ammonia (TMGa, NH3) which decompose when exposed to heat. For example, one gallium (Ga) and one nitrogen atom (N) per precursor molecule are released for the growth of GaN and incorporated into the crystal. In this way, the crystal layer continues upwards atomic layer by atomic layer. The crystal composition can be adjusted by the concentration of the precursor molecules in the gas stream. For example, trimethylindium (TMIn) can be added to the gas phase to produce layers of InGaN. The proportions of In and Ga in the semiconductor layer thus result from the relative concentrations of the precursor molecules in the gas phase.

The MOCVD process also enables the growth of different layers of material on top of each other through the rapid exchange of gases in the reactor. For example, thin layer sequences of GaN and InGaN form the heart of a blue or white LED.

A high yield with regard to the use of the precursors, but also uniformity of the semi-rotary wafers produced, is a basic prerequisite for cost-effective production. Special attention is paid to the design of the gas flow in the reactor, but also to the homogeneity of the temperature distribution.

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Herr Satoshi Fujii
Spare part

Phone: +81 3 5781 0932

Herr Brian Chuang
Spare part

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

Phone: +82 31 371 3023

Herr Colin Wong
Spare part

Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Spare parts

Herr Yun Ling
Spare part

E-Mail senden

Herr Satoshi Fujii
Spare part

E-Mail senden

Herr Brian Chuang
Spare part

E-Mail senden

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

E-Mail senden

Herr Colin Wong
Spare part

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON SE (R&D Center)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Dr. Jens Voigt
Director Product Management

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Research & Development

Prof. Dr. Michael Heuken
Vice President