Service

Customer Service

"Our top objective is long-term collaboration with our customers."
- Arjan Kalwij, Director Customer Service

Our high standards in research and product quality are reflected in our excellent customer services. Your satisfaction is our top priority. Whether we are developing customized CVD systems, installing them at your location, doing periodic maintenance, or expanding systems, we are committed to meeting your individual needs.

Our AIXTRON service team is ready to serve you anywhere in the world. Besides our head office in Herzogenrath near Aachen and our US office in Sunnyvale, we offer reliable support through our branch locations in China, Japan, Korea, Taiwan and other service centers. Count on us for being fast, flexible, and available wherever and whenever you need us.

AIXTRON Service Center worldwide

Service at AIXTRON offers:

 

  • Technical phone support (24/7)
  • Inventory of key spare parts for short delivery times
  • Specialized service and process engineers on site
  • Regional service centers
  • Operating cost calculations
  • Service and maintenance contracts

24/7 Technical Support Line

Our service: 24 hours a day, 7 days a week.

With our reliable 24/7 Technical Support Line, we make sure that you can reach an AIXTRON Customer Service representative around the clock.

Contact the AIXTRON 24/7 Technical Support Line directly:
+49 (2407) 9030-999

In addition, our Service Centers are available for technical assistance during regular local business hours worldwide, thereby offering you and your company integrated support.

AIXTRON Service Center

We would be happy to answer any questions you may have and we look forward to hearing from you.

AIXTRON Training Center & Lab

For optimized technical assistance, we offer technical support, as well as customized training with experts from the industry. The training programs can take place at the AIXTRON Training Center & Lab in Germany, in China (Suzhou), or directly at your location.

Whether you need basic orientation training for your facility systems as part of standardized training, or require specialized training tailored to your company, our programs are geared to your specifications and thereby ensure the long-term production capacity of your systems.

Training for:
  • Technical managers
  • Process engineers
  • Maintenance and service personnel
  • System users
Improve your:
  • Operating times
  • Quality of processes and components
  • Yields
  • Operating costs

 

Seminars and workshops cover the following topics:
  • MOCVD-Systems: Basics
  • MOCVD-Systems: Advanced stage
  • Principles of MOCVD technology
  • In-situ monitoring and ex-situ characterization of epitaxial layer
  • Process tuning - Planetary Reactor
  • Process tuning - Close Coupled Showerhead
  • Device understanding and correlation to epitaxial growth
  • Fab-automation, MES-interface

The following training courses can be selected at the AIXTRON Training Center & Lab.

Upgrades

In a rapidly expanding market environment, your company’s product and service portfolio is also changing. Our experts are available to upgrade your AIXTRON systems with custom-tailored solutions to meet your changing needs.

By upgrading to the next system-type or to new technical specifications, you extend your return on investment. That allows you to respond flexibly to new market requirements, and to redefine corporate objectives.

All system-specific upgrade information is provided subject to reservations and must be adapted to the customer’s requirements.

That’s why a cost proposal includes a technical feasibility review – free of charge.

Details

Vacuum Cleaner
Vacuum Tweezer
Moisture Sensor for Glovebox
Glovebox Dry Pump
Purge Box Function
N2 Spray Gun
Automatic Pump Purge
Glovebox Tray

Details
Sources

MO-G2
MO-G3
MO-G4
MO-G6 

Moisture Sensors
Concentration Measuring Epison 4
Pressure Balancing
H2/N2 Collector Purge
Flow Limit Circuit
MO-Vac Line
MO-Vac High Pressure Purge
Filter Purge Function
Purifier for N2, H2, NH3

Details

CT1000 Filter Unit
EBARA Dry Pump

Details

Digital Flow Meter
Water Filter

Details

Actuell CACE Version
New Computer
UPS
Safety Control Unit
Toxic Gas Monitor CM4

Details

Retrofit

5x6" (6")
5x6" (7x2")
7x6" (6")
7x6" (7x2")
8x4" (4")
8x4" (3x2")
12x3" (3")
12x3" (2")
12x4" (4")
18x3"

Insitu Monitoring

EpiCurve TT für 8x4" (4")
EpiTUNE III
EpiRAS 2000
EpiRAS 2000 TT
IR Thermo Sensor f. Ceiling Temperature

Details

Retrofit

8x4" (1x4")
8x4" (3x2") => 24x2"
12x3"
Yield Plus Package

Insitu Monitoring

EpiCurve TT für 8x4" (4")
EpiTUNE III
IR Thermo Sensor f. Ceiling Temperature

Details

Retrofit

6x6"
6x150mm
11x4"
42x2""

Insitu Monitoring

EpiTUNE III
EpiTUNE III2
EpiCurve TT

Details

Retrofit

8x6"
14x3"
15x4"
60x2"

Details

Retrofit

10x100mm
6x150mm

Details

Retrofit

8x6"
14x4"
56x2"

Details

Retrofit

6x6"

Details

Retrofit

5x200mm

Details

Reactor

6x2" FT Lab System
Tungsten Heater (1300°C)
Pyrometer 4 Ports
Affinity Heatexchanger

Glovebox

TS50 Vacuum Cleaner
Vacuum Tweezer
N2 Spray Gun
Automatic Pump Purge
Moisture/Oxygen Sensor for GB 
Temperature Measurement of GB

GMS

Hygrometers GMS
Differential Pressure Control
Epison 4
Automatic Bubbler Change
Sources MO-Vac High Pressure Purge
N2/H2 MO Selection
Water Cooled Bathes
Purifiers

Vaccum System

Hygrometer Exhaust
Isolation Valves (2nd) Stage Filter
Throttle Valve Uptime Kit

Cooling

Digital Flow Meter

E-Rack

Computer

in-situ

EpiTT
EpiTwinTT
Interferometer

Miscellaneous

Active Door Interlock
Oxydation Kit
Duo Epicat

Details

Reactor

Tungsten Heater (1300°C)
Pyrometer 4 Ports
Affinity Heatexchanger

Glovebox

TS50 Vacuum Cleaner
Vacuum Tweezer
N2 Spray Gun
Automatic Pump Purge
Moisture/Oxygen Sensor for GB 
Temperature Measurement of GB

GMS

Hygrometers GMS
Differential Pressure Control
Epison 4
Automatic Bubbler Change
Sources MO-Vac High Pressure Purge
N2/H2 MO Selection
Water Cooled Bathes
Purifiers

Vaccum System

Hygrometer Exhaust
Isolation Valves (2nd) Stage Filter
Throttle Valve Uptime Kit

Cooling

Digital Flow Meter

E-Rack

Computer

in-situ

EpiTT
EpiTwinTT
Interferometer

Miscellaneous

Active Door Interlock
Oxydation Kit
Duo Epicat

Details

Reacor

AIXTRON Reactor
Tungsten Heater (1300°C)

Glovebox

TS50 Vacuum Cleaner
Vacuum Tweezer
N2 Spray Gun
Moisture/Oxygen Sensor for GB 
Temperature Measurement of GB

GMS

Hygrometers GMS
Differential Pressure Control
Epison 4
Automatic Bubbler Change
Sources MO-Vac High Pressure Purge
Water Cooled Bathes
Purifiers

Vaccum System

Hygrometer Exhaust
Isolation Valves (2nd) Stage filter

E-Rack

Computer

in-situ

EpiTT
EpiTwinTT
Interferometer

Details

55x2"

Details

16x4"
69x2"

Details

19x4"

AIXTRON Spare Parts

Fully stocked spare parts warehouses around the world – for us, that’s a given. We deliver the required components quickly and reliably. We offer expert installation, thereby ensuring that you can resume production after only a short delay. We can also produce customer-specific spare parts upon request.

 

AIXTRON Spare Parts Warehouses: An Overview

China

Mr. Yun Ling

Phone.: +86 21 64453226
Extension: 207

Send e-mail

 

Japan

Mr. Satoshi Fujii

Phone.: +81 3 5781 0932

Send e-mail

 

Taiwan

Mr. Brian Chuang

Phone.: +886 3 5712 678
Extension 250

Send e-mail

 

Europe

Mr. Hajrudin Sakanovic

Phone.: +49 (2407) 9030-674

Send e-mail

South Korea

Mr. Chanyoung Han

Phone.: +82 31 371 3023

Send e-mail