DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX G5+ C

“State-of-the-art Planetary reactor module for advanced GaN application on 150/200 mm substrates (Si/Sapphire/SiC) increases productivity and wafer performance”

Key Benefits

  • Chosen by the best in the industry
  • Highest throughput
  • Lowest Cost of Ownership
  • Highest yield performance
  • 1st fully automated MOCVD platform with Cl2 in-situ cleaning and cassette-to-cassette wafer handler

Product Features

  • Cost advantages of a batch reactor combined with the unique axis symmetric on-wafer uniformity of a single wafer reactor with respect to:
    • wafer bow
    • layer thickness, material composition, dopant concentration
    • component yield
  • Warm ceiling provides lowest heat flux through the wafers
    • Minimized wafer curvature due to minimal vertical temperature gradients
    • Enables the use of Si wafers with standard thickness
  • Wafer temperature optimization through customer-specific design of the substrate pockets

Configurations

  • 8x150 mm
  • 5x200 mm

AIX G5+ C reactor module with cassette-to-cassette wafer handler

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Your contact person

Marketing

Vincent Meric

Vice President Marketing

Phone: +49 (0) 2407 9030-9022

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

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Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

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Christian Geng
Europe

Phone: +49 (2407) 9030 -135

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Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

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Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

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Wei (William) Song
China

Phone: +86 2164453226 ext. 101

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Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

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Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

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Ralf Penner
Senior IR Manager

Phone: +49 (2407) 9030-6153

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Press & Public Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

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Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

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Spare Parts

Service/Kundendienst