DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX G5+ C

“State-of-the-art Planetary reactor module increases productivity and wafer performance”

Key Benefits

  • Chosen by the best in the industry
  • Highest throughput
  • Lowest Cost of Ownership
  • Highest yield performance
  • 1st fully automated MOCVD platform with Cl2 in-situ cleaning and cassette-to-cassette wafer handler

Product Features

  • Cost advantages of a batch reactor combined with the unique axis symmetric on-wafer uniformity of a single wafer reactor with respect to:
    • wafer bow
    • layer thickness, material composition, dopant concentration
    • component yield
  • Warm ceiling provides lowest heat flux through the wafers
    • Minimized wafer curvature due to minimal vertical temperature gradients
    • Enables the use of Si wafers with standard thickness
  • Wafer temperature optimization through customer-specific design of the substrate pockets

Configurations

  • 8x150 mm
  • 5x200 mm

AIX G5+ C reactor module with cassette-to-cassette wafer handler

Your contact person

Product Management

Dr. Jens Voigt

Director Product Management

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Herr Satoshi Fujii
Spare part

Phone: +81 3 5781 0932

Herr Brian Chuang
Spare part

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

Phone: +82 31 371 3023

Herr Colin Wong
Spare part

Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Spare parts

Herr Yun Ling
Spare part

E-Mail senden

Herr Satoshi Fujii
Spare part

E-Mail senden

Herr Brian Chuang
Spare part

E-Mail senden

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

E-Mail senden

Herr Colin Wong
Spare part

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Dr. Jens Voigt
Director Product Management

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Research & Development

Prof. Dr. Michael Heuken
Vice President