DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX G5+ C

“State-of-the-art Planetary reactor module for advanced GaN application on 150/200 mm substrates (Si/Sapphire/SiC) increases productivity and wafer performance”

Key Benefits

  • Chosen by the best in the industry
  • Highest throughput
  • Lowest Cost of Ownership
  • Highest yield performance
  • 1st fully automated MOCVD platform with Cl2 in-situ cleaning and cassette-to-cassette wafer handler

Product Features

  • Cost advantages of a batch reactor combined with the unique axis symmetric on-wafer uniformity of a single wafer reactor with respect to:
    • wafer bow
    • layer thickness, material composition, dopant concentration
    • component yield
  • Warm ceiling provides lowest heat flux through the wafers
    • Minimized wafer curvature due to minimal vertical temperature gradients
    • Enables the use of Si wafers with standard thickness
  • Wafer temperature optimization through customer-specific design of the substrate pockets

Configurations

  • 8x150 mm
  • 5x200 mm

AIX G5+ C reactor module with cassette-to-cassette wafer handler

Broschüre
DOWNLOAD BROCHure
1003.7 KB

Share

Your contact person

Marketing

Vincent Meric

Director Marketing

Phone: +49 (0) 2407 9030-9022

Fax: +49 (0) 2407 9030-40

Send e-mail

Back to product overview

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Yun Ling
China

Phone: +86 21 64453226 Durchwahl: 207

Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Phone: +49 2407 9030-844

Chanyoung Han
South Korea

Phone: +82 31 371 3023

Colin Wong
USA

Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Director Marketing

E-Mail senden

Spare parts

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

E-Mail senden

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

E-Mail senden

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

E-Mail senden

Spare Parts

Service/Kundendienst