Deposition Systems for Compound Semiconductors

G10-SiC

150/200 mm High Throughput Epitaxy for SiC Power Electronics

Dual Wafer Size Batch Reactor

G10-SiC

  • 150 mm and 200 mm – dual wafer size capable – safeguard your investment into the future
  • Highest wafer output / m2 in the market
  • Lowest cost / wafer in the market
  • Excellent run-to-run process performance
  • Highly uniform, low defect SiC epitaxy processes for maximum chip yield
  • Efficient SiC substrate Basal Plane Dislocation (BPD) conversion

     

G10-SiC

Planetary Reactor® for 9 x 150 mm & 6 x 200 mm

Your benefits

  • Single wafer performance in batch configuration
  • Best in class productivity
  • Best in class epi cost

Our solutions

  • Fully automated wafer loading (C2C)
  • Individual wafer Gas Foil Rotation (GFR)
  • Automated Top side wafer Temperature Control (TTC) for optimized batch processing
  • Largest reactor capacity (9 x 150 mm & 6 x 200 mm)
  • High growth rate SiC processes
  • Hot wafer transfer and fast thermal reactor cycling
  • Best in class wafer throughput per m2 fab space efficacy
  • Low consumable cost per wafer
  • Highest efficiency in gas & power consumption per wafer

AIXTRON SiC application lab services

  • Operation of 4 systems for 150/200 mm SiC process development
  • Full material characterization capabilities supported by Fraunhofer Institute, Germany
  • Customer support through SiC process demonstration/developments and training

The best of both worlds

Single wafer performance at lowest batch processing costs

Thickness uniformity

Doping uniformity

Your contact person

Marketing

Dr. Frank Wischmeyer

Vice President Silicon Carbide

Sales

Alan Tai
Taiwan/Singapore

Tel: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Tel: +1 669-228 ext. 3893

Frank Schulte
Europe

Tel: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Tel: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Tel: +82 31 371 ext. 3011

Wei (William) Song
China

Tel: +86 2164453226 ext. 101

Produkte

Vincent Meric
Direktor Marketing

Tel: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Tel: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Tel: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Tel: +49 (2407) 9030-999

AIXTRON Ltd (UK)

Tel: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Tel: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Tel: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Tel: +886 3 571 2678

AIXTRON Inc. (USA)

Tel: +1 (669) 228-3759

Ersatzteile

Satoshi Fujii
Japan

Tel: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Tel: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Tel: +49 2407 9030-844

Chanyoung Han
South Korea

Tel: +82 31 371 3023

Colin Wong
USA

Tel: +1 669 228-3759

Karriere 

Laura Preinich
Recruiter

Tel: +49 (2407) 9030 0

Nachhaltigkeit

Christoph Pütz
Senior Manager ESG & Sustainability

Tel: +49 (0) 2407 9030-5968

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President

Tel: +49 (2407) 9030 3665

Unternehmen & Investor Relations

Guido Pickert
Vice President

Tel: +49 (2407) 9030-444

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Tel: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Produkte

Vincent Meric
Direktor Marketing

E-Mail senden

Ersatzteile

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Karriere 

Laura Preinich
Recruiter

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

E-Mail senden

Unternehmen & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President

E-Mail senden

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Produkte

Vincent Meric
Direktor Marketing

Karriere

Laura Preinich
Recruiter

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

Unternehmen & Investor Relations

Guido Pickert
Vice President

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President