DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS & NOVEL MATERIALS

Closed Coupled Showerhead® CCS and NOVO Systems for R&D

“Flexible MOCVD system for R&D and small scale production”

Key Benefits

  • Versatile R&D platform with integrated glovebox
    • True scaling from R&D to mass production
    • Inherently uniform and reproducible growth for all material systems
    • High flexibility in process window for excellent material quality and uniformity
  • Ideal for small R&D budgets: lowest running cost
    • Low gas flows and high precursor efficiency
    • Easy and low cost maintenance

Product Features

  • High flexibility for various MO and hydride sources
  • Digital mass flow controllers and pressure controllers
  • Professional AIXACT® Advanced Control System with HTML-based GUI
  • Compact footprint

CCS

  • Proven Close Coupled Showerhead® reactor with 3-zone heater
  • Dynamic process gap adjustment – effective process tuning for higher performance
  • 1400°C surface temperature option
  • In-situ monitoring with Laytec EpiTT, EpiCurveTT, and others on request
  • AIXTRON ARGUS full wafer temperature mapping
  • AIXTRON EPISON® gas concentration sensors Configurations (by simple carrier exchange):
    • 3x2 inch, 1x3 inch, 1x4 inch
    • 6x2 inch, 7x2 inch, 3x3 inch, 1x4 inch, 1x6 inch
    • 19x2 inch, 7x3 inch, 5x4 inch, 1x6 inch, 1x8 inch
       

NOVO

  • Cold wall thermal and plasma enhanced CVD showerhead reactor
  • Remote and substrate plasma
  • 1050°C surface temperature
  • Capacity for 1x4 inch wafer or small samples
  • Optional turbo pump for reactor
     

 

CCS / NOVO Systems for R&D

Your contact person

Productmanager CCS F&E und NOVO

Dr. Andrew Pakes

Product Manager

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Public Relations

Henning Marburger

Phone: +49 (2407) 9030 3665

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Careers

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Service

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

Spare Parts

USA: Herr Colin Wong

Phone: +1 669 228-3759

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

Phone: +81 3 5781 0932

South Korea: Herr Chanyoung Han

Phone: +82 31 371 3023

Taiwan: Herr Brian Chuang

Phone: +886 3 5712 678 Durchwahl 250

Investor Relations & Corporate Communications

Guido Pickert
Vice President

E-Mail senden

Public Relations

Henning Marburger

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Careers

Laura Preinich
Recruiter

E-Mail senden

Service

Spare Parts

USA: Herr Colin Wong

E-Mail senden

China: Herr Yun Ling

E-Mail senden

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

E-Mail senden

South Korea: Herr Chanyoung Han

E-Mail senden

Taiwan: Herr Brian Chuang

E-Mail senden

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Fax: +49 (2407) 9030-445

Public Relations

Henning Marburger

Fax: +49 (2407) 9030 445

Products

Dr. Jens Voigt
Director Product Management

Fax: +49 (0) 2407 9030-40

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Careers

Laura Preinich
Recruiter

Fax: +49 (2407) 9030 494

Service

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

Fax: +49 (2407) 9030-167

AIXTRON Inc. (USA)

AIXTRON K.K. (Japan)

Fax: +81 3 5781 0940

AIXTRON Korea Co., Ltd.

Fax: +82 (31) 371-3093

AIXTRON Ltd (UK)

Fax: +44 (1223) 519-888

AIXTRON SE (Headquarters)

Fax: +49 (2407) 9030-40

AIXTRON SE (R&D Center)

Fax: +49 (2407) 9030-8030

AIXTRON Taiwan Co., Ltd. (Main Office)

Fax: +886 3 571 2738