DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX G5+ C

“State-of-the-art Planetary reactor module increases productivity and wafer performance”

Key Benefits

  • Chosen by the best in the industry
  • Highest throughput
  • Lowest Cost of Ownership
  • Highest yield performance
  • 1st fully automated MOCVD platform with Cl2 in-situ cleaning and cassette-to-cassette wafer handler

Product Features

  • Cost advantages of a batch reactor combined with the unique axis symmetric on-wafer uniformity of a single wafer reactor with respect to:
    • wafer bow
    • layer thickness, material composition, dopant concentration
    • component yield
  • Warm ceiling provides lowest heat flux through the wafers
    • Minimized wafer curvature due to minimal vertical temperature gradients
    • Enables the use of Si wafers with standard thickness
  • Wafer temperature optimization through customer-specific design of the substrate pockets

Configurations

  • 8x150 mm
  • 5x200 mm

AIX G5+ C reactor module with cassette-to-cassette wafer handler

Your contact person

Director Product Management

Dr. Jens Voigt

Director Product Management

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Public Relations

Henning Marburger

Phone: +49 (2407) 9030 3665

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Careers

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Service

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

Spare Parts

USA: Herr Colin Wong

Phone: +1 669 228-3759

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

Phone: +81 3 5781 0932

South Korea: Herr Chanyoung Han

Phone: +82 31 371 3023

Taiwan: Herr Brian Chuang

Phone: +886 3 5712 678 Durchwahl 250

Investor Relations & Corporate Communications

Guido Pickert
Vice President

E-Mail senden

Public Relations

Henning Marburger

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Careers

Laura Preinich
Recruiter

E-Mail senden

Service

Spare Parts

USA: Herr Colin Wong

E-Mail senden

China: Herr Yun Ling

E-Mail senden

Europe: Ersatzteile Europa

Japan: Herr Satoshi Fujii

E-Mail senden

South Korea: Herr Chanyoung Han

E-Mail senden

Taiwan: Herr Brian Chuang

E-Mail senden

Investor Relations & Corporate Communications

Guido Pickert
Vice President

Fax: +49 (2407) 9030-445

Public Relations

Henning Marburger

Fax: +49 (2407) 9030 445

Products

Dr. Jens Voigt
Director Product Management

Fax: +49 (0) 2407 9030-40

Corporate Research & Development

Prof. Dr. Michael Heuken
Vice President

Careers

Laura Preinich
Recruiter

Fax: +49 (2407) 9030 494

Service

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

Fax: +49 (2407) 9030-167

AIXTRON Inc. (USA)

AIXTRON K.K. (Japan)

Fax: +81 3 5781 0940

AIXTRON Korea Co., Ltd.

Fax: +82 (31) 371-3093

AIXTRON Ltd (UK)

Fax: +44 (1223) 519-888

AIXTRON SE (Headquarters)

Fax: +49 (2407) 9030-40

AIXTRON SE (R&D Center)

Fax: +49 (2407) 9030-8030

AIXTRON Taiwan Co., Ltd. (Main Office)

Fax: +886 3 571 2738