DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX 2800G4-TM (IC2)

“The best reactor for HVM of GaAs/InP based Optoelectronics and RF applications”

Key Benefits

  • Best Deposition Uniformity Control – at wafer level
  • Lowest Particle Count
  • Highest Product Yield
  • Lowest Production Cost

Product Features

  • Unique true horizontal flow Planetary Reactor – Built in best uniformity & highest efficiency
  • All graphite process chamber – lowest particles and highest repeatability performance
  • Triple process gas injection – maxed out yield optimization
  • Single wafer rotation – combining batch chamber productivity with single chamber tunability
  • Automated satellite loading at high temperature– highest throughput, lowest particles

Configurations

  • 15x4 inch
  • 8x6 inch

AIX 2800G4-TM (IC2)

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Your contact person

Marketing

Vincent Meric

Vice President Marketing

Phone: +49 (0) 2407 9030-9022

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

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Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

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Christian Geng
Europe

Phone: +49 (2407) 9030 -135

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Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

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Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

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Wei (William) Song
China

Phone: +86 2164453226 ext. 101

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Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

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Company & Investor Relations

Carsten Werle
Director Investor Relations (Interim)

Phone: +49 (2407) 9030-8815

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Press & Public Relation

Ragah Dorenkamp
Director Corporate Communications

Phone: +49 (2407) 9030-1830

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Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

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Spare Parts

Service/Kundendienst