26. November 2020 | Press Release

AIXTRON participates in the European Pilot Line for Graphene and 2D Materials

European Commission funds 2D experimental pilot line as part of the Graphene Flagship / Integration of Graphene and Related 2D Materials into semiconductor platform

 

Herzogenrath/Germany, November 26, 2020 – As one of the world's leading suppliers of deposition equipment to the semiconductor industry, AIXTRON SE (FSE: AIXA) and AIXTRON Ltd (UK) are key partners of the 2D Experimental Pilot Line initiative of the Graphene Flagship. AIXTRON, as one of the tool manufacturers, will be responsible for developing the growth and transfer tools and processes necessary for Graphene and Related Materials (GRM).

In order to scale up and integrate graphene and 2D materials into semiconductor devices, AIXTRON will develop a Metal Organic Chemical Vapor Deposition (MOCVD) reactor for growth of these materials directly on to large substrates up to 300mm using its proprietary Close Coupled Showerhead® (CCS) technology. Direct growth allows industrial grade 2D materials and their associated heterostructures to be grown in situ for front-end applications.

For effective back-end integration, AIXTRON will investigate novel processes as well as develop an automated transfer system of 2D material structures on to device wafers. These platforms will provide key capabilities for the pilot line in realizing large scale integration of graphene and 2D materials into logic, memory, photonic and sensor devices.

2D-EPL covers the whole value chain

The European Commission is providing 20 million euros over 4 years for the 2D Experimental Pilot Line (2D-EPL) which started on 1 October 2020. The project will establish an European ecosystem for prototype production of GRM based electronics, photonics and sensors.

The 2D-EPL, comprising 11 partners, covers the whole value chain, including equipment manufacturers, chemical and material providers and pilot processing lines. This will achieve the objective of providing prototyping services to not only the core Graphene Flagship project, but also to external companies, research centers and academics to rapidly drive the adoption of graphene and 2D materials in wafer-scale devices.

“We are very excited to be part of the 2D-EPL project. As a technology leader in semiconductor equipment for more than 30 years, our core expertise is to develop innovative solutions for complex material deposition – and deposition solutions for graphene and 2D materials are a key part of our product portfolio. These materials require very precise composition as well as thickness control down to one atomic layer, and we will leverage the technologies from our semiconductor production platforms to make this new class of materials a success for wafer scale devices,” says Professor Dr. Michael Heuken, Vice President Corporate Research & Development of AIXTRON SE and Professor at RWTH Aachen University.

 

Further information about the 2D-EPL of the Graphene Flagship is available at https://graphene-flagship.eu/pilot-line.

The 2D Experimental Pilot Line has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 649953.

Download press release 187.1 KB

Our registered trademarks: AIXACT®, AIXTRON®, Atomic Level Solutions®, Close Coupled Showerhead®, CRIUS®, EXP®, EPISON®, Gas Foil Rotation®, Optacap™, OVPD®, Planetary Reactor®, PVPD®, STExS®, Trijet®

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Vincent Meric
Director Marketing

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Satoshi Fujii
Japan

Phone: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Phone: +49 2407 9030-844

Chanyoung Han
South Korea

Phone: +82 31 371 3023

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Rita Syre
Senior PR Manager

Phone: +49 (2407) 9030 3665

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Vincent Meric
Director Marketing

E-Mail senden

Spare parts

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Press & Public Relation

Rita Syre
Senior PR Manager

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Products

Vincent Meric
Director Marketing

Career

Laura Preinich
Recruiter

Sustainability

Rainer Goeckel
CSR Manager

Company & Investor Relations

Guido Pickert
Vice President

Press & Public Relation

Rita Syre
Senior PR Manager

Research & Development

Prof. Dr. Michael Heuken
Vice President