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Deposition Systems for Compound Semiconductors

G10-SiC

150/200 mm High Throughput Epitaxy for SiC Power Electronics

Dual Wafer Size Batch Reactor

G10-SiC

  • 150 mm and 200 mm – dual wafer size capable – safeguard your investment into the future
  • Highest wafer output / m2 in the market
  • Lowest cost / wafer in the market
  • Excellent run-to-run process performance
  • Highly uniform, low defect SiC epitaxy processes for maximum chip yield
  • Efficient SiC substrate Basal Plane Dislocation (BPD) conversion

G10-SiC

Planetary Reactor® for 9 x 150 mm & 6 x 200 mm

Your benefits

  • Single wafer performance in batch configuration
  • Best in class productivity
  • Best in class epi cost

Our solutions

  • Fully automated wafer loading (C2C)
  • Individual wafer Gas Foil Rotation (GFR)
  • Automated Top side wafer Temperature Control (TTC) for optimized batch processing
  • Largest reactor capacity (9 x 150 mm & 6 x 200 mm)
  • High growth rate SiC processes
  • Hot wafer transfer and fast thermal reactor cycling
  • Best in class wafer throughput per m2 fab space efficacy
  • Low consumable cost per wafer
  • Highest efficiency in gas & power consumption per wafer

AIXTRON SiC application lab services

  • Operation of 4 systems for 150/200 mm SiC process development
  • Full material characterization capabilities supported by Fraunhofer Institute, Germany
  • Customer support through SiC process demonstration/developments and training

The best of both worlds

Single wafer performance at lowest batch processing costs

Thickness uniformity

Doping uniformity

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Marketing

Dr. Frank Wischmeyer

Vice President Silicon Carbide

Phone: +49 (0) 2407 9030-780

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Sales

Alan Tai
Taiwan/Singapore

Tel: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Tel: +1 669-228 ext. 3893

Frank Schulte
Europe

Tel: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Tel: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Tel: +82 31 371 ext. 3011

Wei (William) Song
China

Tel: +86 2164453226 ext. 101

Produkte

Vincent Meric
Vice President Marketing

Tel: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Tel: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Tel: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Tel: +49 (2407) 9030-999

AIXTRON Europe

Tel: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Tel: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Tel: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Tel: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Tel: +886 3 571 2678

AIXTRON Inc. (USA)

Tel: +1 (669) 228-3759

Ersatzteile

Yun Ling
China

Tel: +86 21 64453226 Durchwahl: 207

Satoshi Fujii
Japan

Tel: +81 3 5781 0932

Brian Chuang
Taiwan/Singapore

Tel: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Europe

Tel: +49 2407 9030-844

Chanyoung Han
South Korea

Tel: +82 31 371 3023

Colin Wong
USA

Tel: +1 669 228-3759

Karriere 

Laura Preinich
Recruiter

Tel: +49 (2407) 9030 0

Nachhaltigkeit

Christoph Pütz
Senior Manager ESG & Sustainability

Tel: +49 (0) 2407 9030-5968

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President

Tel: +49 (2407) 9030 3665

Unternehmen & Investor Relations

Guido Pickert
Vice President

Tel: +49 (2407) 9030-444

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Tel: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Produkte

Vincent Meric
Vice President Marketing

E-Mail senden

Ersatzteile

Yun Ling
China

E-Mail senden

Satoshi Fujii
Japan

E-Mail senden

Brian Chuang
Taiwan/Singapore

E-Mail senden

Ersatzteile Europa
Europe

E-Mail senden

Chanyoung Han
South Korea

E-Mail senden

Colin Wong
USA

E-Mail senden

Karriere 

Laura Preinich
Recruiter

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

E-Mail senden

Unternehmen & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President

E-Mail senden

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

E-Mail senden

Sales

Alan Tai
Taiwan/Singapore

Tel: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Tel: +1 669-228 ext. 3893

E-Mail senden

Frank Schulte
Europe

Tel: +49 (2407) 9030 -768

E-Mail senden

Hisatoshi Hagiwara
Japan

Tel: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Tel: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Tel: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Tel: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Tel: +49 (2407) 9030-999

AIXTRON Europe

Tel: +49 (2407) 9030-828

AIXTRON Ltd (UK)

Tel: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Tel: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Tel: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Tel: +886 3 571 2678

AIXTRON Inc. (USA)

Tel: +1 (669) 228-3759

Produkte

Vincent Meric
Vice President Marketing

Tel: +49 (0) 2407 9030-9022

E-Mail senden

Karriere

Laura Preinich
Recruiter

Tel: +49 (2407) 9030 0

Tom Lankes
Talent Acquisition Expert

Tel: +49 (2407) 9030 0

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

Tel: +49 (0) 2407 9030-5968

E-Mail senden

Unternehmen & Investor Relations

Guido Pickert
Vice President

Tel: +49 (2407) 9030-444

E-Mail senden

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Tel: +49 (2407) 9030-335

E-Mail senden

Presse & Öffentlichkeitsarbeit

Guido Pickert
Vice President

Tel: +49 (2407) 9030 3665

E-Mail senden

Ersatzteile

Service/Kundendienst