DEPOSITION SYSTEM FOR CARBON NANOMATERIALS

BM Pro 2x8"

“Unique batch production solution for graphene and carbon nanotubes”

Key Benefits

  • High quality single/double sided coating of graphene and CNTs for a wider range of applications
  • Fast turnaround time (TAT) (< 1hour)
  • Double showerhead technology for improved gas distribution
  • Low cost of ownership
  • Easy maintenance and cleaning

Product Features

  • Cold wall thermal CVD technology
  • Up to 10 gas channels
  • Temperatures up to 1050 °C
  • Ramp rate 300°C/min
  • Automatic process control with proven recipes
  • Multi-user management and reporting tools
  • Safety system with full data logging

Substratgrößen / Konfigurationen

  • Bis zu 8x8-Zoll Doppel- oder Einzelseitenbe-schichtungen (kleinere Größen auf Nachfrage)

BM Pro 2x8’’

Your contact person

Product Management

Dr. Jens Voigt

Director