DEPOSITION SYSTEM FOR CARBON NANOMATERIALS

BM 300T

“The industry’s tool of reference for your production needs”

Key Benefits

  • Uniform deposition of graphene and carbon nanotubes on 200 mm and 300 mm wafers
  • Thermal and Plasma Enhanced CVD for process flexibility
  • 3-zone substrate heating, max. temperature
    1050 °C
  • Independent 3-zone top heater
  • Compatible with multi or single wafer transfer module

Product Features

  • Showerhead based technology
  • Substrate rotation
  • Automatic process control with proven recipes
  • Multi-user management and reporting tools
  • Safety system with full data logging

Substrate size / configurations

  • 300 mm (12-inch) or 200 mm (8-inch) wafer sizes
  • Liquid precursor delivery
  • Extra ports/feedthroughs for in-situ analysis

BM 300T

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Your contact person

AIXTRON Ltd. UK

Oliver Whear

Director Productmarketing

Phone: +44 1954 208 551

Fax: +44 1223 519 888

Send e-mail

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON SE (R&D Center)

Phone: +49 (2407) 9030-222

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-0

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Spare parts

Herr Yun Ling
Spare part

Phone: +86 21 64453226 Durchwahl: 207

Herr Satoshi Fujii
Spare part

Phone: +81 3 5781 0932

Herr Brian Chuang
Spare part

Phone: +886 3 5712 678 Durchwahl 250

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

Phone: +82 31 371 3023

Herr Colin Wong
Spare part

Phone: +1 669 228-3759

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

Press & Public Relation

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

Sales

Alan Tai
Taiwan/Singapore

E-Mail senden

Christof Sommerhalter
USA

E-Mail senden

Frank Schulte
Europe

E-Mail senden

Hisatoshi Hagiwara
Japan

E-Mail senden

Nam Kyu Lee
South Korea

E-Mail senden

Wei (William) Song
China

E-Mail senden

Products

Dr. Jens Voigt
Director Product Management

E-Mail senden

Spare parts

Herr Yun Ling
Spare part

E-Mail senden

Herr Satoshi Fujii
Spare part

E-Mail senden

Herr Brian Chuang
Spare part

E-Mail senden

Ersatzteile Europa
Spare part

Herr Chanyoung Han
Spare part

E-Mail senden

Herr Colin Wong
Spare part

E-Mail senden

Career

Laura Preinich
Recruiter

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

E-Mail senden

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

E-Mail senden

Frank Schulte
Europe

Phone: +49 (2407) 9030 -768

E-Mail senden

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-0

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Dr. Jens Voigt
Director Product Management

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

E-Mail senden

Sustainability

Rainer Goeckel
CSR Manager

Phone: +49 (0) 2407 9030-1830

E-Mail senden

Company & Investor Relations

Guido Pickert
Vice President

Phone: +49 (2407) 9030-444

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President

Phone: +49 (2407) 9030-335

E-Mail senden

Spare Parts

Service/Kundendienst