DEPOSITION SYSTEM FOR CARBON NANOMATERIALS

BM 300T

“The industry’s tool of reference for your production needs”

Key Benefits

  • Uniform deposition of graphene and carbon nanotubes at 300 mm wafer scale
  • Thermal and Plasma Enhanced CVD for process flexibility
  • 3-zone substrate heating, max. temperature
    1050 °C
  • Independent top heater with 3 zones
  • Compatible with multi or single wafer transfer module

Product Features

  • Showerhead based technology
  • Substrate rotation
  • Automatic process control with proven recipes
  • Multi-user management and reporting tools
  • Safety system with full data logging

Substrate size / configurations

  • 300 mm (12-inch) or 8-inch wafer sizes
  • Liquid precursor delivery
  • Extra ports/feedthroughs for in-situ analysis

BM 300T

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Your contact person

Product Management

Dr. Jens Voigt

Director

Phone: +49 (0) 2407 9030-9022

Fax: +49 (0) 2407 9030-40

Send e-mail

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