“Personally, I’m motivated by transforming research results into viable products.”

Forschung und Entwicklung

Prof. Dr. Michael Heuken, Vice President, Corporate Research & Development


CVD of Chalcogenid materials for phase-change memories

CNR, Italy / ST Microelectronics, Italy / Epichem Limited, UK / CSIS, Spain / Vilnius University, Lithuania

Watch video about the CHEMAPH project


Hydride Gasphase Epitaxy for the production of improved GaN substrates

Freiberger Compound Materials GmbH (FCM), Germany / Ferdinand-Braun-Institut für Höchstfrequenztechnik (FBH), Germany / University of Ulm, Germany / Max-Planck-Institute of Microstructure Physics (MPI), Germany

Funded by the Federal Ministry of Education and Research (BMBF)


Device and Circuit performance boosted through silicon material fabrication

SOITEC, France / STMicroelectronics, France / AMD Saxony, Germany / SILTRONIC, Germany / DOLPHIN, France / CEA-LETI, France / FZ Juelich, Germany / MPE-Halle, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


Production oriented R&D Laboratory



Development and manufacturing of 200/300 mm III-V selective epitaxy MOCVD tool for dual-channel CMOS (sub)-22 nm technology

NCSR-D, Greece / IMEC, Belgium / IBM, Switzerland / CEA-LETI, France / STMicroelectronics, France / NXP Semiconductors, Belgium / University of Glasgow, UK / Katholike Universitaet Leuven, Belgium


New vaporization technology for OVPD to develop organic solar cells

AIXTRON SE, Germany / Freie Universität Berlin, Germany / Helmholtz Zentrum Berlin, Germany

Funded by the German Federal Ministry of Economics and Technology


Vertical HVPE system for the production of GaN substrates

FBH, Germany / FCM, Germany / OSRAM, Germany / Fraunhofer IAF, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


MOCVD technology for the production of InN based nanophotonic devices

Uni Montpellier, France / Epichem, UK / SAES Getters, Italy

KinX (EU)

Knowledge Integration and Network Expertise

RWTH Aachen, Germany / Head Acoustics, Germany / Uni Twente, The Netherlands / Uni Tel Aviv, Israel / EKD, Spain / NetKnowledge, Israel / Cerobear, Germany / Morskate, The Netherlands / Optibase, Israel


65nm CMOS 300

FZ Jülich, Germany / AIR Liquide, France / LMPG, France / Epichem, UK / Jobin Yvon, France / CEA-LETI, France / ST Microelectronics, France


45nm CMOS 300

ST Microelectronics, France / ST Microelectronics, Italy / IMEC, Belgium / LMPG, France / CEA-LETI, France / LTM, France / AIR Liquide, France / Jordan Valley, Israel / NCSR, Greece / MDM, Italy / Sigma Aldrich, UK

Funded by the Federal Ministry of Education and Research (BMBF)


Merging Optics and Nanotechnology

CEA-LETI, France / IMEC, Belgium / Acreo, Sweden / Schott, Germany / Alcatel Thales, France / ASMI, The Netherlands / EPIC, European Organisation / VDI-TZ, Germany / CNOP-OV, France / Yole Development, France


Materials for Robust Gallium Nitride

Alacatel Thales III-V Lab, France / Czech Technical University, Czech Republic / Element Six Ltd., UK / EPFL, Switzerland / Fcubic AB, Sweden / FORTH, Greek / Gwent Electronic Materials Ltd., UK / University Of Glasgow, UK / Impact Coatings AB, Sweden / IEE, Slovakia / CNRS, France / Instytut Technologii Elektronowej, Poland / IVF, Sweden / University of Grenoble, France / MFA, Hungary / MicroGaN GmbH, Germany / SIFAM Fibre Optics, UK / STU, Slovakia / University of Ulm, Germany / University of Vienna, Austria / University Of Bath, UK / Vivid Components Ltd., UK


N2T2 (EU)

Novel nano-template technology and its applications / GaN HVPE

Konarka, Austria / Photeon Technologies, UK / University of Rome, Italy / University of Linz, Austria / University of Bath, UK / ILC, Slovakia / Holotools, Germany


In-situ monitoring for the MOCVD of AlGaIn structures on 4-inch substrates

OSRAM, Germany / Fraunhofer IAF, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


In-situ process control for MOCVD of nanostructures

TU Berlin, Germany / LayTec, Germany

Funded by the Federal Ministry of Education and Research (BMBF)

NaSol (NRW)

Semiconducting nano wires for application in solar cells and LEDs

University Duisburg-Essen, Germany / AIXTRON SE, Germany


MOCVD process development for buffer layers in CIS solar modules

Würth Solar, Germany / ZSW, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


High brightness OLEDs for ICT & Next Generation Lighting Applications

Philips, Germany and The Netherlands / CNRS, France / CNR-ISOF, Italy / Merck OLED Materials, Germany / Fraunhofer IPM, Germany / H.C. Starck, Germany / IMEC, Belgium / KU Leuven, Belgium / Uni Lecce, Italy / Novaled, Germany / OSRAM-OS, Germany / Academy of Sciences, Poland / Schott, Germany / Siemens, Germany / Syntec, Germany / Uni Dresden, Germany / Uni Ghent, Belgium / Uni Groningen, The Netherlands / University of Kassel, Germany /EPFL, Switzerland / University of Strasbourg, France

OLLA project delivers final OLED milestone


Organic Phosphorescent lights for Applications in the Lighting market 2008

OSRAM Opto Semiconductors GmbH, Germany / Philips GmbH, Germany / BASF Future Business GmbH, Germany / Applied Materials, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


Integration of optical Sensors in Equipment for Surface- and Thinfilm Technology to increase the Process Reliability and the Process Control

RWTH Aachen, Germany / FCT, Germany / Bruker Optik, Germany / AIS, Germany / Fraunhofer IWS, Germany

GFunded by the Federal Ministry of Education and Research (BMBF)


High brightness OLEDs for lighting applications

Philips, Germany / RWTH Aachen, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


OVPD for organic solar cells

HMI, Germany / Merck OLED Materials, Germany

Plasmatech (EU)

In-situ process control for MOCVD of monostructures

European Network


GaAs and GaN based quantum dot emitter and optimized electronical detection equipment for system testing of quantum cryptography transmission protocols

University of Wurzburg, Germany / Becker & Hickl GmbH, Germany / Ludwig-Maximilians-University, Germany / University of Bremen, Germany / Forschungszentrum Julich GmbH, Germany / qutools GmbH, Germany

Funded by the Federal Ministry of Education and Research (BMBF)

RAINBOW (Marie Curie ITN)

High quality Material and intrinsic Properties of InN and indium rich Nitride Alloys

CNRS, France / TU Berlin, Germany / University of Madrid, Spain / University of Bologna, Italy / Alcatel Thales III-V Labs, France / University of Glasgow, UK / University Of Jena, Germany / EPFL, Switzerland / University of Warwick, UK / University of Ilmenau, Germany / IFPAN, Poland / TKK, Finland

RodSol (EU)

All-inorganic nano-rod based thin-film solarcells

IPHT, Germany / MPI, Germany / EMPA, Switzerland / MFA, Hungary / Austrian Research Center GmbH, Austria / VTT, Finland / PICOSUN, Finland / BiSOL, Slovenia / WTC, Germany / iSuppli, Germany / CalTech, USA


Self assembled nanostructures for optoelectronic devices

European Network


Ruthenium atomic vapor deposition (AVD) competitivness in nano-electronic device generations

Infineon Technologies, Germany / Fraunhofer IISB, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


Deposition of Spin-polarized materials like GaMnAs for spintronic applications

University of Würzburg, Germany / University of Marburg, Germany

Funded by the Federal Ministry of Education and Research (BMBF)


Technology for Wafer-scale Carbon Nanotube Applications

University of Cambridge, UK / AIXTRON SE, Germany / Philips GmbH, Germany / IMEC, Belgium / Thales Research and Technology, France / Thales Electron Devices, France / Cambridge CMOS sensors, UK / Fritz Haber Institute, Germany / TU Berlin, Germany / Technical University of Denmark, Denmark / Swiss Federal Institute of Technology, ETHZ


Tetragonal strained Silicon for nanoelectronic applications

AMD, Germany / Infineon, Germany / Wacker Siltronic, Germany / FZ Jülich, Germany / MPI, Germany / IMEC, Belgium

Funded by the Federal Ministry of Education and Research (BMBF)

TOPAS 2012

Transparent organic phosphorescent devices for applications in lighting systems

OSRAM Optosemiconductors, Germany / Royal Philips Electronics, The Netherlands / BASF Future Business GmbH, Germany / BASF, Germany

The term AVD® is a registered trademark.

UltraGaN (EU)

InAIN/(In)GaN heterostructure technology for ultra-high power microwave transistors

Thales-TRT, France / CNRS, France / TU Wien, Austria / Academy of Science, Slovakia / EPFL, Switzerland / FORTH, Greece / University of Ulm, Germany


IT toolbox for innovation management

RWTH Aachen, Germany / mecca neue medien, Germany / JET Lasersysteme, Germany

WTZ / China

Training center in China

University of Hong Kong, China / University of Tsinghua, China / RWTH Aachen, Germany