• Planetary und Horizontal Reactor

    • Für alle Planetary Reactor und Horizontal Reactor Anlagentypen

      • Glovebox

        Glovebox

        Vacuum Cleaner
        Vacuum Tweezer
        Moisture Sensor for Glovebox
        Glovebox Dry Pump
        Purge Box Function
        N2 Spray Gun
        Automatic Pump Purge
        Glovebox Tray

      • Gas Mixing System

        Gas Mixing System

        Sources

        MO-G1
        MO-G2
        MO-G3
        MO-G4
        MO-G6 

        Moisture Sensors
        Concentration Measuring Epison 4
        Pressure Balancing
        H2/N2 Collector Purge
        Flow Limit Circuit
        MO-Vac Line
        MO-Vac High Pressure Purge
        Filter Purge Function
        Purifier for N2, H2, NH3

      • Vacuum System

        Vacuum System

        CT1000 Filter Unit
        EBARA Dry Pump

      • Cooling System

        Cooling System

        Digital Flow Meter
        Water Filter

      • Control Unit

        Control Unit

        Actuell CACE Version
        New Computer
        UPS
        Safety Control Unit
        Toxic Gas Monitor CM4

    • AIX 2600 Serie

      • AIX 2600G3 IC

        AIX 2600G3 (R)

        Retrofit

        5x6" (6")
        5x6" (7x2")
        7x6" (6")
        7x6" (7x2")
        8x4" (4")
        8x4" (3x2")
        12x3" (3")
        12x3" (2")
        12x4" (4")
        18x3"

        Insitu Monitoring

        EpiCurve TT für 8x4" (4")
        EpiTUNE III
        EpiRAS 2000
        EpiRAS 2000 TT
        IR Thermo Sensor f. Ceiling Temperature

      • AIX 2600G3 HT IC

        AIX 2600G3 HT

        Retrofit

        8x4" (1x4")
        8x4" (3x2") => 24x2"
        12x3"
        Yield Plus Package

        Insitu Monitoring

        EpiCurve TT für 8x4" (4")
        EpiTUNE III
        IR Thermo Sensor f. Ceiling Temperature

    • AIX 2800 Serie

      • AIX 2800G4 HT

        AIX 2800G4 HT

        Retrofit

        6x6"
        6x150mm
        11x4"
        42x2"

        Insitu Monitoring

        EpiTUNE III
        EpiTUNE III2
        EpiCurve TT

      • AIX 2800G4 R

        AIX 2800G4 R

        Retrofit

        8x6"
        14x3"
        15x4"
        60x2"

      • AIX 2800G4 WW

        AIX 2800G4 WW

        Retrofit

        10x100mm
        6x150mm

    • AIX G5 HT

      • AIX G5 HT

        AIX G5 HT

        Retrofit

        8x6"
        14x4"
        56x2"

      • AIX G5 WW

        AIX G5 WW

        Retrofit

        6x6"

      • AIX G5+

        AIX G5+

        Retrofit

        5x200mm

  • Close Coupled Showerhead

    • Für alle Close Coupled Showerhead Anlagen

      • 3x2" FT

        3x2" FT (Lab System)

        Reactor

        6x2" FT Lab System
        Tungsten Heater (1300°C)
        Pyrometer 4 Ports
        Affinity Heatexchanger

        Glovebox

        TS50 Vacuum Cleaner
        Vacuum Tweezer
        N2 Spray Gun
        Automatic Pump Purge
        Moisture/Oxygen Sensor for GB
        Temperature Measurement of GB

        GMS

        Hygrometers GMS
        Differential Pressure Control
        Epison 4
        Automatic Bubbler Change
        Sources MO-Vac High Pressure Purge
        N2/H2 MO Selection
        Water Cooled Bathes
        Purifiers

        Vaccum System

        Hygrometer Exhaust
        Isolation Valves (2nd) Stage Filter
        Throttle Valve Uptime Kit

        Cooling

        Digital Flow Meter

        E-Rack

        Computer

        In-situ

        EpiTT
        EpiTwinTT
        Interferometer

        Miscellaneous

        Active Door Interlock
        Oxydation Kit
        Duo Epicat

      • 6x2" FT

        6x2" FT (Lab System)

        Reactor

        Tungsten Heater (1300°C)
        Pyrometer 4 Ports
        Affinity Heatexchanger

        Glovebox

        TS50 Vacuum Cleaner
        Vacuum Tweezer
        N2 Spray Gun
        Automatic Pump Purge
        Moisture/Oxygen Sensor for GB
        Temperature Measurement of GB

        GMS

        Hygrometers GMS
        Differential Pressure Control
        Epison 4
        Automatic Bubbler Change
        Sources MO-Vac High Pressure Purge
        N2/H2 MO Selection
        Water Cooled Bathes
        Purifiers

        Vaccum System

        Hygrometer Exhaust
        Isolation Valves (2nd) Stage Filter
        Throttle Valve Uptime Kit

        Cooling

        Digital Flow Meter

        E-Rack

        Computer

        In-situ

        EpiTT
        EpiTwinTT
        Interferometer

        Miscellaneous

        Active Door Interlock
        Oxydation Kit
        Duo Epicat

      • 30x2"/31x2"/37x2" CRIUS I

        30x2" IC

        Reactor

        AIXTRON Reactor
        Tungsten Heater (1300°C)

        Glovebox

        TS50 Vacuum Cleaner
        Vacuum Tweezer
        N2 Spray Gun
        Moisture/Oxygen Sensor for GB
        Temperature Measurement of GB

        GMS

        Hygrometers GMS
        Differential Pressure Control
        Epison 4
        Automatic Bubbler Change
        Sources MO-Vac High Pressure Purge
        Water Cooled Bathes
        Purifiers

        Vaccum System

        Hygrometer Exhaust
        Isolation Valves (2nd) Stage filter

        E-Rack

        Computer

        In-situ

        EpiTT
        EpiTwinTT
        Interferometer

      • CRIUS II

        CRIUS II

        55x2"

      • CRIUS II-L

        CRIUS II-L

        16x4"
        69x2"

      • CRIUS II-XL

        CRIUS II-XL

        19x4"

In einem schnell wachsenden Marktumfeld befindet sich das Produkt- und Leistungsportfolio Ihres Unternehmens in einem stetigen Wandel. Aus diesem Grund stehen Ihnen unsere Experten für den individuellen Umbau Ihrer AIXTRON Anlagen mit maßgeschneiderten Lösungen zur Verfügung.

Durch ein Upgrade auf den nächsten Anlagetyp oder auf technisch neue Anforderungen erhalten Sie Investitionssicherheit. So können Sie flexibel auf neue Marktanforderungen reagieren und Unternehmensziele neu definieren.

Jede systemspezifische Upgrade-Information wird unter Vorbehalt gegeben und muss an die Anforderungen des Kunden angepasst werden.

Ein Kostenvoranschlag beinhaltet deshalb eine kostenlose Prüfung der technischen Realisierbarkeit.

Unsere eingetragenen Warenzeichen

AIXACT®, AIXTRON®, Atomic Level SolutionS®, Close Coupled Showerhead®, CRIUS®, Gas Foil Rotation®, OVPD®, Planetary Reactor®, PVPD®, TriJet®