!!! Press Release !!! Green AIXTRON AIX 200/4 MOCVD Reactor with In-situ Monitoring in Operation at the University of Tokyo In an industry predominated by the use of highly toxic gases, the University of Tokyo is operating an environmentally friendly "green" MOCVD reactor supplied by AIXTRON. The AIX 200/4 reactor, which is being used for research into long-wavelength lasers, modulators, and photonic integrated circuist, uses the alternative precursors TBA and TBP and is producing excellent results. The only hydride used was H2S for n-type doping which is far less toxic than arsine or phosphine. During the short two-week start-up, in which AIXTRON also installed the entire gas supply, uniformities of 1.5 µm ± 1.5 nm and 1.05 µm ± 1 nm across 2" wafers were achieved with TBA and TBP. Now the University of Tokyo has successfully produced laser devices. AIXTRON also installed a UV-IR spectroscopic ellipsometer for in-situ monitoring to analyse and evaluate growth rate and composition of the layers. A Fourier-Transformed-Infra-Red unit to define the precursor cracking efficiency has been adapted to the reactor for investigation of the chemistry of the MOCVD process. The AIX 200/4 MOCVD reactor system has been developed for the production of ultra-high uniform layered structures of III-V and II-VI semiconductors and other materials in R & D and production. The horizontal reactor permist the handling of 2", 3" or 4" wafers. The reactor has a unique laminar flow design without turbulence which allows for precise control of the material composition and guarantees ultra sharp interfaces. Wafer rotation is provided by the patented Gas Foil Rotation® AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R & D oriented systems up to large-scale production systems for up to 95 x 2" wafers. The company has installed numerous systems the world over and is represented in over 15 countries. Among AIXTRON's list of industrial clients are names such as Alcatel, AT&T Hewlett Packard, IBM, Motorola, NEC, Philips, Rockwell, Siemens and many more. AIXTRON also contributes significantly to research advancements in the field of MOCVD, working on many joint R&D projects with major partners worldwide. AIXTRON has installed systems in many of the world's most renowned research institutes including JPL-CALTEC, Sandia Nat. Lab., Fraunhofer Institute, the Technical University of Berlin, CNET and CNRS, to name but a few. For further information please contact:
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