University of Magdeburg signed contract for
AIX 200/4RF-S MOCVD Reactor for GaN

The University of Magdeburg and AIXTRON are pleased to announce that the University of Magdeburg has purchased an AIX 200/4RF-S MOCVD system with in situ reflectometry for the growth of III-Nitride compounds, in particular AlGaN based structures for detectors and electronic applications. The AIX 200 series Nitride reactors are the most widely used systems for R&D and small scale production of III-Nitrides. Using these reactors with wafer rotation, research institutes, as well as production companies are obtaining results, that even surpass state-of-the-art data reported from Japanese Inventors of blue Nitride LEDs. The AIX 200 Series Nitride systems have already been purchased by many well-known laboratories such as Agilent (former Hewlett Packard), Meijo Univ., UEC, National Central Univ. Taiwan, Northwestern Univ., Univ. Ulm, Purdue Univ., Daimler Benz and the Fraunhofer Institute, Freiburg, to name just a few.

As Prof. Alois Krost, head of the Magdeburg semiconductor epitaxy group, states: "The group will strongly focus on the growth of high quality AlGaN based structures for electronic and sensor applications. The development of these and related materials for new electronic devices is one of the main goals of our research and part of the Magdeburg "Center for New Materials". For this purpose the AIX 200/4RF-S is the ideal MOCVD system which ensures high reliability and flexibility, a prerequisite for the growth of a variety of different materials. The consequent design of the reactor for all kinds of in-situ monitoring will allow us to combine the growth of highest quality nitride based structures with sophisticated optical investigations inside the reactor."

The larger 7x2" GaN Planetary Reactor^® AIX 2000/2400HT, with dual wafer rotation provided by the patented Gas Foil Rotation^®, has been developed for ultra-high uniform production of III-V and II-VI compound semiconductors and other materials. These reactors are the workhorse of the III-Nitride industry producing all kinds of blue, green and white LEDs.