!!! Press Release !!!

United Epitaxy Company (UEC), Ltd. has ordered an
AIXTRON Planetary Reactor
â for the growth of AlGaInN

AIXTRON AG is pleased to announce that UEC, Hsinchu, Taiwan, has recently placed an order for an AIXTRON Planetary Reactorâ with a capacity of 6x2" wafers. This Planetary ReactorÒ system will be used for the growth of III-Nitride opto-electronic devices.

Several AIX 2000HT systems are in operation worldwide for the growth of high quality AlGaInN for various applications such as blue and green LEDs. UEC’s decision to purchase an AIXTRON reactor is clearly due to its well-known advantages: These include its low cost of ownership due to high process efficiency, large capacity, reliability and through-put. Proven in blue and green LED manufacturing, the excellent stability guarantees a high yield. The AIXTRON reactor is designed with the well known horizontal laminar two-flow system which enables ultimate performance in Nitride materials.

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor® production systems for up to 25x4 inch or 9x6 inch wafers. The company has installed over 290 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in over 15 countries.

Among AIXTRON's list of industrial clients are Alcatel, Conexant, EPI, Epitronics, Hewlett-Packard, Honeywell, ITT, Kopin, Lucent, Motorola, NEC, Nortel, Osram, Samsung, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL, ITRI-OES, Sandia Nat. Lab., Fraunhofer Institute, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.


For further information please contact:

Octavia Schirmer
Marketing Manager
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen
Germany
Phone: +49 (241) 8909-474
Fax: +49 (241) 8909-40
E-mail: info@aixtron.com

© AIXTRON AG May 1999


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