!!! Press Release !!!

AIXTRON Introduces the TriJet^TM Liquid
Precursor Delivery and Evaporation System

Based on a new concept for the highly repeatable delivery and evaporation of liquid precursors as used in MOCVD of oxide-based materials, AIXTRON introduces the TriJet^TM Liquid Precursor Delivery and Evaporation System. TriJet^TM is modularly integrated into AIXTRON’s Tricent^TM MOCVD System for the deposition of multicomponent ferroelectric materials (e.g. SBT, PZT) and high-k materials for capacitor and gate dielectrics (e.g. BST, ZrO₂, HfO₂). As an important pre-requisite for the production-scale MOCVD of those materials, AIXTRON identified the precisely-controlled and highly repeatable delivery of the liquid precursors and their evaporation. The delivery and evaporation unit developed by the French company J.I.P.ELEC showed a stable performance over time, resulting in a highly repeatable film deposition, satisfying the high requirements of full-scale production. J.I.P.ELEC’s technology concept is based on an exclusive license granted to them by the French CNRS research institute, for which AIXTRON acquired an exclusive worldwide license.

Contrasting to other commercial systems that were thoroughly evaluated by AIXTRON, the TriJet^TM system’s repeatable performance is primarily based on a contactless evaporation of the precursor materials, thus completely avoiding residual material on a hot (evaporating) surface. It has been observed that residual material may give cause to the creation of particles and to "memory effects", negatively affecting the repeatability of results. In the TriJet^TM system, the precursors are instead injected into a heated volume, the evaporator, in precisely controlled doses, to be efficiently evaporated without any residue.

AIXTRON acquired Shareholding in J.I.P.ELEC

In order to support J.I.P.ELEC in the further development of the LDS technology, AIXTRON acquired a minority stake of 7.4% of J.I.P.ELEC, at the same time having been granted the exclusive license to use J.I.P.ELEC’s technology and secure delivery under an exclusive OEM agreement. With the Tricent^TM platform fully developed to implement the TriJet^TM technology, AIXTRON is now ready to satisfy the market demand for production-mature solutions for the deposition of ferroelectric and high-k materials.

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