!!! Press Release !!!

University of Montpellier purchases AIX 200/4RF-S MOCVD Reactor

AIXTRON is pleased to announce that the University of Montpellier II has purchased an AIX 200/4RF-S MOCVD Reactor for the growth of Nitrides, in particular AlGaN based structures for detectors and electronic applications. The AIX 200 series Nitride reactors are the most widely used systems for R&D and small scale production of III-Nitrides. Using these reactors, research institutes, as well as production companies obtain results, even surpassing state-of-the-art data reported from Japanese Inventors of blue Nitride LEDs. The AIX 200 series systems have already been purchased by many well-known laboratories such as Hewlett Packard, UEC, National Central University of Taiwan, Northwestern University, Purdue University, Daimler Benz and the Fraunhofer Institute, Freiburg, to name just a few.

As Dr. Olivier Briot, head of the GaN team at the Semiconductor Group, stated: "The decision for an AIXTRON MOCVD system is based on the outstanding performance and high flexibility of the AIX 200 series for the growth of Nitrides at many places world-wide, such as Meijo University, HP-Labs, NWU and the IAF/Fraunhofer Institute. The AIX 200/4 RF-S is known as a highly reliable MOCVD system; the stainless steel reactor offers many advantages such as the optical access for in-situ monitoring using reflectometry and/or ellipsometry." Similar technology is used in the AIXTRON Multiwafer Planetary Reactorsâ for the mass production of Nitride based devices.

The larger GaN Planetary Reactor® AIX 2000/2400HT, with wafer rotation provided by the patented Gas Foil Rotation®, has been developed for ultra-high uniform production of III-V and II-VI compound semiconductors and other materials. These reactors are the workhorse of the III-Nitride industry producing all kinds of blue, green and white LEDs.

AIXTRON provides a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D oriented systems up to large-scale production systems for up to 95x2 inch wafers. The AIX 3000 system, designed for high throughput of 95x2 inch wafers per run for the production of compound semiconductors, is the world’s largest MOCVD production system. AIXTRON’s systems for GaN applications, the AIX 2000HT, AIX 200/4HT and AIX 200RF reactors, are highly successful around the world. Nitride retrofits and upgrades are also available for other AIXTRON systems.


For further information please contact:

Octavia Schirmer
Marketing Manager
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen
Germany
Phone: +49 (241) 8909-474
Fax: +49 (241) 8909-40
E-mail: info@aixtron.com

© AIXTRON AG July 1999


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