Mitsubishi Electric Corp. ordered an AIX 2400G3
system for Laser mass production

AIXTRON AG is pleased to announce the sales of an AIX 2400G3 Planetary Reactor^® System equipped with an automatic wafer handler to Mitsubishi Electric Corporation, Itami, Japan. Mitsubishi will produce their high quality lasers with the AIX 2400G3 Reactor system as it is a proven mass production tool which produces high quality layers with excellent uniformity and high efficiency. The automatic wafer handler with silicon industry like cassette to cassette operation guarantees low cost production of this special device.

Dr. Masayoshi Takemi, chief engineer of Mitsubishi, states: "We are convinced that this reactor is the most efficient mass production system for us to be competitive in the booming market of optoelectronic devices."

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor^® production systems for up to 25x4" or 9x6" wafers. AIXTRON has installed over 300 systems worldwide. The company provides an extensive service and support network for maintenance as well as upgrading systems and is represented in over 15 countries.