!!! Press Release !!!

AIXTRON announces sale of manufacturing equipment to KOPIN

AIXTRON is pleased to announce that it has signed a contract for the supply of two AIXTRON Planetary Reactor® AIX 2400 systems to KOPIN. The AIX 2400 will be used by KOPIN for the mass production of 4" AlGaAs/GaAs and GaInP based HBT wafers.

According to Dr. Holger Juergensen, President and CEO of AIXTRON, "KOPIN selected the AIX 2400 MOCVD production system due to the high reliability and highly uniform growth of AlGaAs/GaAs and GaInP with very high purity".

The purchase of this AIXTRON production system clearly indicates KOPIN´s position and commitment as the leading GaAs wafer producer. Dr. John Fan, President and CEO of KOPIN stated that "the AIXTRON installation represents a major investment in production capacity at the Taunton facility. KOPIN´s goal in this fast growing industry is to provide the major 4" wafer capacity required for the growing market of devices for wireless comunications. We believe that these systems offer the most reliable and advanced technology for the mass production of GaAs related materials".

Already proven in industry the AIX 2400 represents the world standard production tool in this business area. The two-flow horizontal reactor permist the handling of up to 5 x 4", 8 x 3" or 15 x 2" wafers. The reactor has a laminar flow design without turbulence for precise control of the material composition, p- and n-doping and the achievement of ultra sharp interfaces. Wafer rotation is provided by the patented Gas Foil Rotation®. The machines are manufactured according to the highest quality standards, including AIXTRON´s ISO 9001 certification, the European CE as well as high German engineering standards.

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R & D- oriented systems up to large-scale Planetary Reactor® production systems for up to 95 x 2" wafers. The company has installed over 160 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in 18 countries. Among AIXTRON's list of industrial clients are names such as Alcatel, AT&T, EPI, Hewlett Packard, Honeywell, IBM, Motorola, NEC, Philips, Rockwell, Samsung, Siemens and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL-CALTEC, Sandia Nat. Lab., Fraunhofer Institute, CNET and CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R & D projects with major partners worldwide.

AIXTRON was the first MOCVD equipment manufacturer to obtain the ISO 9001 international certification. KOPIN Corporation based in Taunton, MA, is a leading supplier of GaAs based HBT materials for wireless communication and a manufacturer of flat panel display products.

For further information please contact:

Andreas Melas
Director Business Development
AIXTRON Inc.
1670 Barclay Blvd.
Buffalo Grove
IL 60089
USA
Tel: +1(847) 215 7335
Fax: +1(847) 215 7341
Sarah O´Connell
Marketing Manager
AIXTRON AG
Kackertstr. 15 - 17
52072 Aachen
Germany
Tel: +49 (241) 8909-22
Fax: +49 (241) 8909-40

© AIXTRON March 1996


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