3 AIXTRON Reactors for Hahn-Meitner-Institute, Berlin

AIXTRON is pleased to announce that it has sold 3 reactors to the renowned Hahn-Meitner-Institute (HMI) in Berlin. All 3 systems will be used for intensified research in the area of advanced photovoltaic devices. Two of the systems are part of national and European research projects involving both HMI and AIXTRON.

An AIX 200 MOCVD has already been successfully installed and is being used for the growth of ZnSe and wide gap chalcopyrites (CuGaSe₂) for tandem solar cells with high efficiency. Prof. Lux-Steiner who is leading the research expressed enthusiasm for the AIX 200 reactor, "The AIX 200 is ideally suited for this research. It is a proven MOCVD system offering high uniformity and with the possibility to scale up to production in the near future."

The horizontally designed reactor handles 1 x 2" wafers and has been developed for the growth of highly uniform layered structures of III-V and II-VI semiconductors and other materials in R & D and production. The reactor has a laminar flow design without turbulence for precise control of the material composition and the achievement of ultra sharp interfaces. Wafer rotation is provided by the patented Gas Foil Rotation®

The second system acquired by HMI is a Close Spaced Vapour Transport (CSVT) system which is specially designed for very high growth rates (about 1µm/min.). This system, which will be installed this Summer, will also be used for the growth of ZnSe and wide gap chalcopyrites (CuGaSe₂) for tandem solar cells with high efficiency.

Another AIX 200 will be used by Prof. Willig´s team for solar applications. It will be equipped for direct transfer of the sample to ultra high vacuum. The installation is scheduled for Autumn this year.

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R & D- oriented systems up to large-scale Planetary Reactor^® production systems for up to 95 x 2" wafers. The company has installed over 200 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in 18 countries. Among AIXTRON's list of industrial clients are names such as Alcatel, AT&T, EPI, Hewlett Packard, Honeywell, IBM, Motorola, NEC, Philips, Rockwell, Samsung, Siemens and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL-CALTEC, Sandia Nat. Lab., Fraunhofer Institute, CNET and CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R & D projects with major partners worldwide.

Sarah O´Connell
Marketing Manager
AIXTRON AG
Kackertstr. 15 - 17
52072 Aachen
Germany
Tel: +49 (241) 8909-473
Fax: +49 (241) 8909-40

email: o.schirmer@aixtron.com
www: http://www.aixtron.com