Purchase Order for an AIX 2600G3 for VCSEL fabrication
from CSEM - Switzerland

CSEM and AIXTRON AG are pleased to announce a contract for delivery of an AIX 2400/2600G3 Planetary Reactor^® MOCVD system to CSEM (Centre Suisse d´Electronique et de Microtechnique SA), Zürich, Switzerland. CSEM runs a renowned R & D and production site, fabricating highest quality single mode VCSELs in the spectral range between 760nm and 960nm. Recently, CSEM researchers have won the Grand Prize at the 'Best of Sensor Expo Awards' (Baltimore, 1999).

CSEM has decided to purchase the AIX 2400/2600G3 reactor after carefully evaluating the capabilities of various reactors offered by MOVPE suppliers. The final decision for AIXTRON was based on the flexibility and growth efficiencies obtained in this reactor. VCSEL growth has the toughest requirements on MOVPE growth and they found that the AIXTRON reactors meet them to an optimum.

The AIX 2600G3 has a flexible design for 35x2 inch to 5x6 inch wafers and has already been qualified for 35x2 inch high volume manufacturing of High Brightness LEDs. The two-flow horizontal Planetary Reactor^® is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The reactor concept allows laminar gas flow without turbulences for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with high growth efficiency on multiple 2, 3, 4 or 6 inch wafers is achieved through wafer rotation by the patented Gas Foil Rotation^®.