!!! Press Release !!!

ATMI´s EPITRONICS UNIT INCREASE EPITAXY CAPACITY
Using AIXTRON High Throughput Multi Wafer MOCVD Tool

Epitronics Corporation, a subsidiary of Advanced Technology Materials, Inc. (Nasdaq: ATMI), today announced an agreement to purchase a high throughput multiwafer AIX 2600G3 MOCVD (metal organic chemical vapor deposition) production tool from AIXTRON AG for delivery in the third quarter of 1997.

The tool will be used to produce AlGaAs (aluminium gallium arsenide) and InGaP (indium gallium phosphide) heterostructures on 100 and 150 mm gallium arsenide wafers. Epitronics´ heterostructures are sold to producers of heterostructure bipolar transistor (HBT)-based components for wireless communications, direct broadcast satellite, and CATV systems.

The higher performance, higher frequency operation requirements of these systems, coupled with their rapid deployment planned over the next decade have created a growing demand for this family of microwave and millimeter wave integrated circuits. Epitronics is a leader in the development of MOCVD processes to create the required starting substrate for manufacture of these type components. As part of the purchase agreement, a suite of Epitronics-developed MOCVD HBT growth processes will be qualified on the reactor prior to shipment.

The AIXTRON machine is also suited for manufacture of heterostructures for GaAs based solar cells, a market in which Epitronics has participated in the R&D stages and is evaluating commercial opportunities. Demand for GaAs-based, space-qualified solar cells from planned wireless communication satellite systems is forecast to exceed industry capacity over the next 18-24 months.

The AIXTRON system features automatic cassette-to-cassette wafer handling and 76, 100 and 150 mm wafer capability. It can be upgraded to process up to eight 100 mm diameter wafers at one time. When completely configured, the new reactor will be capable of producing up to 2500 100 mm wafers per month.

Dr. Timothy F. Murray, Epitronics´ Director of Sales and Marketing said, "The new system - and close customer cooperation - enables us to meet the quality, prices and quantities our customers need to grow their businesses. We are already working on a demand-driven plan for purchase of additional machines."

Dr. Michael A. Tischler, Vice-President Operation at Epitronics, declared, "AIXTRON worked very hard to win this order. They took our requirements for uniformity and lowest cost of ownership and showed us that this machine will deliver what our customers need."

Dr. Duncan W. Brown , President of Epitronics, stated "This investment is a significant commitment on our part to ensure our customers a stable and growing supply of the enabling starting wafers for their rapidly growing businesses. We invested now, so that we can support the ramp ups customers have forecast for 4Q97 and 1998. Our mission is to be the world's leading supplier of advanced semiconductor materials. This cutting edge, high throughput equipment will help us get there. We are pleased to be working with AIXTRON, the leading supplier of these highly sophisticated systems".

Dr. Holger Juergensen, President of AIXTRON, said, " Epitronics´ purchase of this system puts them in a very competitive position in their core epitaxial wafer products. Their choice of this AIXTRON machine assures them support from the world leader in MOCVD equipment for their epitaxial processing expertise required for the growth caused by design wins of Epitronics customers. We are pleased to work for Epitronics on this repeat system order and demonstrate our commitment to the epi wafer industry.

ATMI is a leading provider of advanced semiconductor materials and environmental equipment. It is also developing next-generation semiconductor devices based on its new materials technologies. Epitronics, an ATMI company, is a leading supplier of high performance wafers and thin film materials for wireless communications and optoelectronics devices.

AIXTRON is the leading manufacturer of high throughput production MOCVD reactors worldwide. Its flexibly designed equipment is used for the production of III-V, II-VI, HTSC (high temperature superconductors), ferroelectrics, oxides, SiC (silicon carbide), diamond and other materials. The company has over 200 installed systems worldwide, used to produce opto- and microelectronic components such as LEDs, lasers, detectors, HEMTs, MESFETs, HBTs, guided optics and many other advanced devices. Represented in over 18 countries, AIXTRON provides an extensive service and support network for maintenance and upgrades. Its newest generation, AIX 2400/2600G3 is the first MOCVD reactor to offer true robotic wafer handling for high throughput and low cost of ownership. AIXTRON was also the first MOCVD company to receive DIN ISO 9001 certification.

Statements which are not historical information are forward looking, and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or ATMI's markets; competition, problems, or delays developing and commercializing new products, and other factors discussed in ATMI's filings with the Securities and Exchange Commission.

For further information please contact:

AIXTRON AG
Sarah O'Connell
Marketing Manager
Kackertstr. 15 - 17
D-52072 Aachen
Germany
Phone: +49 (241) 8909-0
Fax: +49 (241) 8909-40
e-mail:
info@aixtron.com
www:
http://www.aixtron.com

Eptironics Corporation
Timothy F. Murray
Director of Sales and Marketing
21002 N. 19th Avenue, Suite 5
Phoenix, AZ 85027
USA
Phone: +1 (602) 581 3663
Fax: +1 (602) 581 3415
e-mail:
wafers@atmi.com
www:
http://www.atmi.com

April 1997


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