The Advent of the real Cassette-to-Cassette MOCVD system

!!! Press Release !!!

NEW MOCVD PRODUCTION ERA

The Advent of the real Cassette-to-Cassette MOCVD system:

The new AIX 2400/2600G3

AIXTRON is pleased to announce the introduction of the AIX 2400/2600G3, an updated version of the multiwafer MOCVD Planetary Reactor for production scale manufacturing, offering new and enhanced features. Based on the proven Planetary Reactor^® design the AIX 2400/2600G3 includes all the features of the existing Planetary Reactor^® systems as well as some brand new features with true Cassette-to-Cassette loading of wafers, offering higher uptime and throughput, and easier handling and flexibility.

After many years of MOCVD development, the Planetary Reactor^® has proven to be the most efficient MOCVD reactor concept for all III-V applications. The Planetary Reactor^® technology has matured and this year both Users and AIXTRON are celebrating "10 Years of the Planetary Reactor^® at the AIXTRON User Meeting which will be held during the ICMOVPE Conference in Cardiff. While reactors are already used in the manufacture of a wide variety of products, the now proven longterm stability of the processes demonstrated that the technology was ready for true automation. In its recent developments therefore, AIXTRON put emphasis on the integration with true Cassette-to-Cassette wafer handling systems. These wafer handlers are readily available from the Silicon industry. A development team was formed between a leading supplier and AIXTRON with development work focused on the adaptation to the MOCVD reactors.

Today, the updated versions AIX 2400/2600G3 have already been contracted by selected customers in the form of beta-siting cooperations to carry out full qualifications for different products. So far three beta-sites are established, one each in the US, Asia and Europe. A limited number of further beta-siting contracts with preferential terms and conditions are available for various applications.

The AIX 2400/2600G3 is the first MOCVD reactor offering in one package:

true Cassette-to-Cassette automated wafer loading
complete automated control of all reactor boundary conditions,
including reactor walls and rotation controls
full process qualification for many products
5x6", 9x4" or 35x2" capacity
in-situ cleaning
in-situ monitoring options

The AIX 2400/2600G3 is the third generation of Planetary Reactors^® and includes all the key features already developed for in situ monitoring of the process parameters such as monitoring of the rotation of the satellite and monitoring of the temperature of the ceiling. The system can be used for the processing of III-V materials, UHB-LEDs, solar cells as well as II-VI and other material systems.

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R & D- oriented systems up to large-scale Planetary Reactor^® production systems for up to 95 x 2" wafers. With an annual turnover of around DM 40 million the company has installed over 180 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in 18 countries. Among AIXTRON's list of industrial clients are names such as Alcatel, AT&T, EPI, Hewlett Packard, Honeywell, IBM, Motorola, NEC, Philips, Rockwell, Samsung, Siemens and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL-CALTEC, Sandia Nat. Lab., Fraunhofer Institute, CNET and CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R & D projects with major partners worldwide.