!!! Press Release !!!

Epistar Corporation and AIXTRON AG are pleased to announce a further contract for delivery of additional AIX 2600G3 Planetary Reactor^® MOCVD systems to Epistar Corporation, Hsinchu, Taiwan in order to ramp up their mass production for High Brightness LEDs.

As Dr. Jacob Tarn, Vice President, said, "these G3 systems became already the major work force for High Brightness AlInGaP LEDs and Epistar is taking full advantage of the larger capacity of the AIX 2600G3. Today Epistar is able to produce from the AIX 2600G3 the brightest absorption substrate (AS) AlGaInP LEDs on the market."

The AIX 2600G3 has a flexible design for 35x2 inch to 5x6 inch wafers and has already been qualified for 35x2 inch high volume manufacturing of High Brightness LEDs. The two-flow horizontal Planetary Reactor^® is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The reactor concept allows laminar gas flow without turbulences for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with high growth efficiency on multiple 2, 3, 4 or 6 inch wafers is achieved through wafer rotation by the patented Gas Foil Rotation^®.

AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D- oriented systems up to large-scale Planetary Reactor^® production systems for up to 25x4 inch or 9x6 inch wafers. The company has installed over 280 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in over 15 countries. Among AIXTRON's list of further industrial clients are names such as Alcatel, AT&T, EPI, Epitronics, Hewlett-Packard, Honeywell, IBM, Kopin, Motorola, NEC, Philips, Rockwell, Samsung, Siemens, UEC, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL-CALTEC, ITRI-OES, Sandia Nat. Lab., Fraunhofer Institute, CNET and CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.

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© AIXTRON AG January 1999

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