AIXTRON purchases Bede QC200™ for GaN characterisation

!!! Press Release !!!

AIXTRON PURCHASES BEDE QC200™ FOR GaN CHARACTERISATION

Bede Scientific recently shipped an advanced QC200™ system to AIXTRON AG, the MOCVD equipment manufacturer based in Aachen Germany, for the analysis of GaN-based epitaxial structures including InGaN multi-quantum well devices. The QC200™ was configured to provide both the symmetric 0002 and the asymmetric (1,0,-1,2) reflection for GaN samples up to 75mm diameter.

The Bede QC200™ is an ideal tool for routine characterisation of semiconductor substrates and epitaxial structures up to 200mm diameter. Through the incorporation of the advanced Bede Microsource®, data can be collected rapidly on sub-mm areas in a compact, low-power tool. Accurate data reduction is provided automatically and rapidly with the Bede RADS Mercury simulation and auto-fitting software.

Bede has supplied high resolution X-ray quality control tools to AIXTRON, for 13 years, and AIXTRON is still utilising an older QC2a for analysing InP and GaAs based materials.

Neil Loxley, Chief Executive of Bede, said, 'We are very happy that we have been able to help the world-market leader in MOCVD systems to develop solutions for so many years. We pride ourselves on our innovative technology which is enabling our customers to stay ahead of the competition.'

AIXTRON stated: "Based on our previous experiences with our existing Bede systems, we were convinced that the new Bede QC200™ was the most appropriate system for obtaining highly precise results in a very short time. The new hardware and software features enable very comfortable and easy handling".

Bede Scientific Instruments Limited is a subsidiary of Bede plc, listed on the main market of the London Stock Exchange. Bede develops and manufactures innovative metrology tools for the routine materials characterisation of advanced semiconductor devices.

AIXTRON manufacture MOCVD (metal organic chemical vapour deposition) equipment for compound semiconductors and oxide based materials. This process has established itself as the industrial standard in the production of compound semiconductors. AIXTRON's equipment is based on the patented PLANETARY REACTOR®, and offers optimum production quality together with low operating costs and high overall efficiency. AIXTRON shares are listed at the stock exchange in Frankfurt, Germany (Reuters symbol: AIXG.DE; ISIN: DE0005066203).

For further information please contact:

Andrea Maichin
Marketing Assistant
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 351
Fax: +49 241 8909 149
E-mail: A.Maichin@aixtron.com