!!! Press Release !!!



AIXTRON's Tricent MOCVD tool to be acquired by Oki
for the commercial production of low power,
ultra fast 16Mbit FeRAMs.

Aachen / Tokio / Colorado Springs, 11 May, 2004 - AIXTRON is pleased to announce that, within the framework of a three-company agreement between AIXTRON, SYMETRIX Corporation and Oki Electric Industry Company, an AIXTRON Tricent MOCVD tool is being acquired by Oki for the commercial manufacturing of high-density FeRAM non-volatile memories.

The tool will be used by Oki for commercial production of FeRAM devices, starting with a full line of devices from 64k to 16Mbit. Engineering samples are scheduled to be released by the forth quarter of 2004.

Oki and SYMETRIX have jointly developed a new kind of FeRAM at Oki's Hachioji, Japan R & D center. This new technology exhibits significantly faster speeds and uses substantially less power than existing FeRAMs in production. Simultaneously, AIXTRON and SYMETRIX have developed the MOCVD process at AIXTRON's facilities in Aachen, Germany and at SYMETRIX' research facilities in Colorado Springs, Colorado.

With the delivery of this production tool, the three companies have achieved a major milestone in the ongoing commercialization of FeRAMs. An MOCVD tool capable of meeting commercial production specifications has long been sought by the FeRAM industry. Experts consider such a tool as essential for the manufacturing of high density FeRAM devices with the high yields required in a commercial manufacturing environment.

"The delivery of this tool to Oki marks the successful culmination of a lot of hard development work by AIXTRON and SYMETRIX," says Tim McEntee, Executive Vice President and COO Semiconductor Equipment at AIXTRON AG. "The installation of our MOCVD tool in a production setting for FeRAMs is a major milestone. It has become increasingly clear that FeRAMs are a non-volatile memory solution that will enjoy widespread market penetration for many years ahead and we expect our tool to play a key role."

About Oki Electric Industry Co., Ltd.

Founded more than a century ago in 1881, Oki Electric Industry Co., Ltd. is Japan's first telecommunications manufacturer, with its headquarter in Tokyo, Japan. With the corporate vision, "Oki, Network Solutions for a Global Society," Oki Electric provides top-quality products, technologies and solutions to its customers through its telecommunications systems, information systems and electronic devices segments. All three segments are integrated into one effective organization that functions as a collective force to create exciting new products and technologies, including information and telecom converged solutions. Through its business activities, Oki Electric satisfies a spectrum of customer needs in various markets. Visit Oki's global web site at http://www.oki.com/.

About Symetrix Corporation

Symetrix Corporation is a world leader in FeRAM technology, spanning sixteen years of activity and development of novel devices in several areas of Integrated Ferroelectrics. Symetrix is privately held and is the owner of over 140 U.S. issued patents covering materials, processes and circuits in the area of "Layered Perovskites" FeRAMs. This family of materials makes possible ultra-low power and very fast high density FeRAMS unlike other ferroelectric memory technologies. Currently, Symetrix has several licensees worldwide in various aspects of FeRAM technology, including the complete suite of ferroelectric process module patents in a CMOS friendly environment. Symetrix is also involved in applications of FeRAMs in embedded systems, smart cards and Ferro-ASICs.

About AIXTRON AG

AIXTRON is, as verified by an independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse in Frankfurt) and is included in the MSCI World Index.


For further information please contact:

Investor Relations and Corporate Communications
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 444
Fax: +49 241 8909 445
E-mail: invest@aixtron.com

© AIXTRON AG, May 11, 2004


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