!!! Press Release !!!

Aachen, May 6, 2004 - AIXTRON - the global market leader for MOCVD equipment, the key technology for the production of compound semiconductors and other complex material systems - generated consolidated revenues of EUR 25.4 million for the first quarter of 2004 (2003: EUR 18.7 million). Revenues by region were: 13% U.S.A, 74% Asia and 13% Europe.

The net profit before tax amounted to EUR 0.1 million (Q1 2003: loss before tax of EUR -6.7) million. Profit after tax was EUR 0.1 million (Q1 2003: consolidated loss of EUR -4.4 million). Earnings per share were EUR 0.00 (Q1 2003: loss per share of EUR -0.07). Cash and cash equivalents worth EUR 47 million (previous quarter EUR 45.3 million), which were not reduced by any liabilities to banks, and an equity ratio of 76% (previous quarter 79%) underline the strategic flexibility that AIXTRON has managed to retain throughout this difficult period.

The continued growth of the LED market is driving healthy demand for AIXTRON systems, particularly in Asia. AIXTRON's new orders for MOCVD equipment increased quarter-on-quarter to total EUR 30.1 million in Q1 (Q1 2003: EUR 15.2 million). The resulting reported equipment order backlog at the end of Q1 amounted to EUR 66.5 million.

AIXTRON's Executive Board is confirming its 2004 forecast of revenues of EUR 121 million (2003: EUR 91.3 million) and a breakeven net profit after tax (2003: net loss after tax of EUR -19.2 million).

CEO Paul Hyland said "This is now the fourth consecutive quarter of increased demand, echoing the recent public pronouncements of confidence by many of our customers.

The continued progress, over the last twelve months, in the profit and cash management initiatives have left us well placed to not only convert the orders recently received into revenue but also to maintain a well balanced and healthy balance sheet.

The quality of our projected Compound revenues combined with the very positive progress in the new market areas of Display and Silicon Semiconductor markets are giving us increased confidence in our 2004 guidance and our targeted new market opportunities"

The complete Q1/2004 quarterly report is available at www.aixtron.com.

This release does not constitute an offer or invitation to subscribe for or purchase any securities. In addition, the securities of AIXTRON Aktiengesellschaft have not been registered under the United States Securities Laws and may not be offered, sold or delivered within the United States or to U.S. Persons absent registration under or an applicable exemption from the registration requirements of the Unites States Securities Laws. Certain of the statements contained herein may be statements of future expectations and other forward-looking statements that are based on management's current views and assumptions and involve known and unknown risks and uncertainties that could cause actual results, performance or events to differ materially from those expressed or implied in such statements. The company assumes no obligation to update any forward-looking information.

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© AIXTRON AG, May 6,2004

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