!!! Press Release !!!

Aachen / Atsugi-Shi, Kanagawa Pref., Japan, 23 March, 2004, - Thomas Swan Scientific Equipment (TSSE) member of the AIXTRON group is delighted to secure further system sales in Japan by receiving an order from the research group of Dr. Kobayashi of NTT Photonics Laboratories. The 6x2” Closed-Coupled Showerhead (CCS) MOCVD system will be used for the extensive research and development of innovative electrical and optical devices based on GaN materials.

Dr. Kobayashi’s research group within the High-Speed Devices and Technology Laboratory is contributing extended effort to the development of the next generation of electrical and optical devices and networks. The CCS technology will be utilized for continued progress for optimization of compound semiconductor structures based on larger substrate sizes.

NTT Photonics Laboratories are engaged in the research and development of innovative photonics devices that take full advantage of the potential capability of the optical semiconductor technologies, ultra-high speed electronic circuit and device technologies and planar lightwave circuit technologies. These devices will contribute to the development of the next generation of photonic networks.

Dr. Kobayashi from NTT Photonics Laboratories comments: "We are pleased to embrace TSSE as our technology partner, and we believe that the CCS technology will provide us with major benefits and high specification GaN device performance. The Thomas Swan multi wafer system has obtained very high market acknowledgment in Japan and it will be an essential element to further reduce the lead time from R&D level to mass production."

Roger Hunter of TSSE adds: "TSSE is delighted to be a partner of choice by providing our proven CCS technology to such an experienced leader involved with innovative photonics technologies and as well as the technology transfers to commercialization of new products. We are very pleased with our successful business in both Japan and Taiwan during the past twelve-month period, which has resulted in increased demand, market acknowledgment and extension of our relationship in Asia. In addition, TSSE and Marubun, our Japanese partner, are delighted by the successful use of our proven CCS technology for GaN R&D and production applications in the Japanese market."

The showerhead approach with its inherent scalability to deliver increased yields has given Thomas Swan a strong business platform for significant increase in market share. TSSE's large-scale CCS production platforms combine improved performance and uniformity with increased throughput and reduced cost of ownership.

AIXTRON is, as verified by a independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

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© AIXTRON AG, March 23 , 2004

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