!!! Press Release !!!

Aachen/Ankara, Turkey, 19 February, 2004 - The Bilkent University of Ankara is one of Turkey's most recognized private universities which has established collaborations with many international universities worldwide. Lately Bilkent's Department of Physics decided to set a new focus on research of AlGaN based devices which are used in UV photodetectors. These devices could be employed for medical applications. For their ascending research activities on nano-science Bilkent invests in a new institute building, where the new cleanroom will soon house the recently ordered state-of-the-art AIX 200/4 RF-S MOCVD system. The AIX 200/4 RF-S is the most widely used GaN R&D reactor. It is suitable for the growth of all Al-Ga-In-N compounds and offers high flexibility in the choice of in-situ measurement methods which qualifies the system, in particular, for research applications.

"AIXTRON is pleased to receive the first order from Turkey's Bilkent University one of its renowned private universities. Bilkent University will be supplied with a complete system installation comprising the planning and the establishment of the periphery equipment, including gas and H2/N2 purifier cabinets, the exhaust treatment system, security surveillance tools and the necessary tubing. The system will also be equipped with the unique EpiR-TT in-situ monitoring tool, allowing for monitoring the growth rate, temperature, surface morphology and optical properties of the crystal layers during the epitaxial growth," stated AIXTRON's Executive Vice President for Compound Semiconductor TechnologieS, Dr. Bernd Schulte.

Prof. Ekmel Ozbay, researcher at the Faculty of Science, Department of Physics at Bilkent comments: "We are convinced that the AIXTRON MOCVD system will serve our demanding development project in all respects. The wide-ranging knowledge of the AIXTRON team in the complex field of CVD equipment is very impressive and helpful. We very much welcome the start of a new cooperation with the AIXTRON AG by establishing a joint demonstration laboratory."

AIXTRON is, as verified by an independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

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© AIXTRON AG, February 19, 2004

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