!!! Press Release !!!

Aachen / Garching, 18 December, 2003 - The Walter Schottky Institute (WSI), a central institute of the Technische Universität München (TUM) orders a state-of-the-art AIX 200/4 MOCVD system ideally suited for complex research studies. Founded in 1986 the WSI is focused to strengthen the interaction between basic physics and semiconductor electronics research. With a total area of about 2400 m² laboratory and office space the WSI accommodates four research groups, Experimental Semiconductor Physics I, Experimental Semiconductor Physics II, Semiconductor Technology, and Theoretical Semiconductor Physics. The Semiconductor Technology group, headed by Prof. Amann concentrates on VCSELs and edge-emitting lasers in the wavelength region up to 10µm as well as millimeter wave devices.

The WSI will utilize the new system for studies on long wavelength VCSEL (Vertical Cavity Surface Emitting Laser) layer structures with its unique Buried Tunnel Junction (BTJ). Based on the (InGa-Al) (As-P-Sb) material system, lasers with a wavelength of 1.55µm to 2.0µm will be manufactured. These devices are regarded as key components of future fiber optic communication systems. Prof. Dr. Amann comments: "We look very much forward to continue our research project on the promising Antimony compound layers with the state-of-the-art AIXTRON MOCVD equipment."

Dr. Bernd Schulte, AIXTRON's Exec. VP, CSTS explains: "We are proud to enter into cooperation with a leading research institute like WSI in view of the development of pioneering electronic devices for next generation opto-electronic applications. The AIX 200/4 MOCVD system is the ideal instrument for the research in the very fascinating topic of VCSEL devices.

AIXTRON is, as verified by a independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

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© AIXTRON AG, December 18 , 2003

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