!!! Press Release !!!

Aachen / Suwon-City, October 20, 2003 - AIXTRON AG, the leading Supplier of Compound Semiconductor Equipment is pleased to announce the upcoming installation of another GaN MOCVD mass production system at Samsung Electro-Mechanics Co., Ltd. (SEMCO), facilities in Suwon-City, South Korea. The AIX 2600G3 HT reactor will be delivered to the Advanced Development Team (ADT) of SEMCO in the near future and will be utilized for the future development and production of blue and white LED devices.

Dr. S. M. Lee, Manager at SEMCO-ADT comments: "SEMCO provides highest quality compound semiconductor devices for all kinds of high end applications, in accordance with SEMCO’s high quality standards. SEMCO is considered as Koreas most important manufacturer of Compound Semiconductor Devices. Our Advanced Development Team has always been very successful with AIXTRON’s Planetary Reactor and we are looking forward to the imminent delivery and installation of this brand new system. We concluded that only the AIXTRON Planetary Reactor offers several unique features we require for our future developments like the high process flexibility, highest reproducibility and the unique in situ process monitoring tool EpiTUNE II. We are confident to drastically shorten our development cycles and costs and boost our technological leadership”.

Mr. Y.Y. Kim, General Manager of AIXTRON Korea Ltd. adds: “AIXTRON, as the world market leader for MOCVD equipment, has established a solid reputation in Korea as a manufacturer of a high quality Compound Semiconductor Equipment and I believe it is this reputation coupled with SEMCO’s extensive expertise in the compound semiconductor process that has generated an extremely high level of interest amongst our customers in Korea for our products and services. With our team of field service and process engineers and our local spare parts stock we assure complete and fast local service which is a key motivation for our industrial and R&D customers”.

AIXTRON has been building MOCVD Reactors since 1983 and its latest G3 reactors series are used in mass production by all major semiconductor device manufacturers worldwide.

AIXTRON is, as verified by an independent research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

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© AIXTRON AG, October 20, 2003

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