!!! Press Release !!!

Aachen / Troy, New York, May 26 2003 – With the purchase of a new AIX 200/4 RF-S MOCVD system, Rensselaer Polytechnic Institute (RPI) is taking the first step into a co-operation with AIXTRON. RPI will use the AIXTRON system for joint research in the field of GaN Ultra High Brightness LEDs for a spectral range of green to deep ultra violet. Additionally the growth of AlGaN with a high Aluminium content as utilized for electronic devices will be investigated. Located in Troy, NY, RPI is a highly respected technical institution with an excellent and innovative research environment producing the industry leaders of tomorrow .

A new research thrust, the Future Chips Constellation, has been founded at RPI. As newly appointed Senior Constellation Chair, Professor E. Fred Schubert comments: “We have chosen the state-of-the-art AIX 200/4 RF-S due to AIXTRON’s highly successful history and continuing advancement in GaN MOCVD research and development. We can move forward confidently and efficiently in our GaN material studies knowing we have a reliable source of GaN thin films. We are delighted that we can count on AIXTRON as a major partner in our research thrust and look forward to a successful and enduring relationship.” Dr. Bernd Schulte, Executive VP and COO for Compound Semiconductor Equipment at AIXTRON AG, adds: “AIXTRON is grateful for the further endorsement of its GaN MOCVD research system via Professor Schubert’s purchase and invitation to join the Future Chips Constellation.”

Based on the extremely successful AIX 200/4 reactor series, the stainless steel version AIX 200/4 RF-S for growth at high temperatures offers high flexibility in the choice of in-situ measurement methods. Numerous optical ports allow for the connection of AIXTRON’s innovative EpiTune and Epi-RAS instruments for in-situ monitoring of growth rate, temperature, structure and optical properties of the crystal. The EpiTune II in-situ monitoring tool included in the system ordered by RPI can monitor processes at a temperature range between 400° C and 1600°C, thus all III-V processes can be real-time monitored.

AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard of the German stock exchange (Deutsche Börse AG) and is included in the Dow Jones Sustainability Index World and the MSCI World Index.

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© AIXTRON AG, May 26, 2003

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