!!! Press Release !!!

First Mass Production MOCVD Reactors for
GaN Based LED Manufacturing in Mainland China

Aachen/Shanghai, P.R. China – AIXTRON AG is proud to announce the receipt of a purchase order for multiple AIX 2600G3 HT MOCVD systems with 24x2” configuration from Shanghai LanBao Photoelectric Material Co., Ltd. The world’s largest MOCVD reactors for mass production of GaN based LEDs will be installed in LanBao’s new production facilities in Shanghai.

LanBao’s decision to start up their blue/green LED business using AIXTRON Planetary Technology is based on the success of their technical partners, Professor Zhou JunMing and Professor Chen Hong of the Institute of Physics at the Chinese Academy of Science in Beijing. "We were able to quickly develop a commercially competitive product on our AIX 2400G3 HT MOCVD reactor under mass production conditions – not least thanks to the very good support from the AIXTRON AG Shanghai Branch Office, the local Service representation of AIXTRON’s Global Service Operations (GSO)," states Professor Zhou. Professor Chen comments: “The world wide success of the AIX 2600G3 HT MOCVD system as the most advanced production tool for GaN based materials is in full compliance with our excellent experience with the Planetary Reactor. This technology is the basis for high productivity of high quality devices at low cost.”

Vice General Manager Chen of LanBao adds: "The quick and successful penetration of the local and global GaN based LED market strongly depends on the transfer of the technology developed by our partner. We are very confident that with the support of GSO we will quickly succeed in transferring the processes to our new AIX 2600G3 HT mass production MOCVD reactors. This will enable LanBao to qualify and introduce state-of-the-art GaN based LEDs at very competitive conditions."

Steve Perry, Executive Vice President and COO, Global Service Operations comments: "We are happy that our local support in P.R. China could be established quickly and efficiently through our recently opened AIXTRON AG Shanghai Branch Office. The goal of GSO is to support our customers world-wide through a network of local representations and our HQs in Aachen, Germany. Our customers’ success is our success – LanBao’s decision to enter mass production of GaN based LEDs using AIXTRON technology is proving us right."

AIXTRON’s customized MOCVD systems are the key technology enabling development and manufacture of compound semiconductors and many other multi-component materials. The many advantages of the AIXTRON Planetary Reactors include user-friendly operation, excellent process stability as well as very high precursor efficiencies and world best uniformities. Together with excellent reliability and high throughput, all these properties lead to a valuable device yield and a high uptime.

AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec_DAX of the German stock exchange (Deutsche Börse) and is included in the Dow Jones Sustainability Index World and the MSCI World Index.

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© AIXTRON AG, January 2003

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