!!! Press Release !!!

Uni Light selects AIXTRON’s 24x2" Large Scale Reactor as
 Platform for Mass Production of GaN-LEDs

Aachen/Taoyuan, March 17 2003 – AIXTRON reports the recent sale of an MOCVD system in 24x2" wafer configuration to Uni Light Technology, one of the leading Epitaxial Foundries for mass production of InGaN based LEDs. The system will be installed in Uni Light’s production facility based in Taoyuan, Taiwan.

Mr. Hun-Huang Liu, President of Uni Light Technology describes: "We have been actively evaluating today’s high capacity GaN MOCVD systems and have decided to choose AIXTRON’s 24x2” reactor to start our aggressive expansion plan for the year 2003. AIXTRON is offering, with the AIX 2600G3 HT, concrete performance advantages such as high throughput at highest precursor utilization and extremely high device performance. In today’s market, it is mandatory for Epitaxial Foundries to provide highly uniform epitaxial products in a consistent quality to meet the stringent quality requirements of customers. With AIXTRON’s well proven large scale GaN Planetary Reactor, we will continue to play a leading role in the market with competitive production costs and highest quality epitaxial products."

Dr. Bernd Schulte, Executive Vice President, COO of the Business Unit Compound Semiconductor adds: "This is further proof that AIXTRON’s superior Planetary Reactor Technology is first choice also for professional MOCVD epi manufacturers. The strongly growing LED market demands high class LEDs at highly competitive prices. With our tool, Uni Light has now chosen the ideal platform to meet these requirements. A true competitive system – the AIXTRON 2600G3 HT, with a reactor capacity of 24x2" wafers, with which we can successfully push the performance of our customers."

AIXTRON’s customized MOCVD systems are the key technology enabling development and manufacture of compound semiconductors and many other multi-component materials. The many advantages of the AIXTRON Planetary Reactors include user-friendly operation, excellent process stability as well as very high precursor efficiencies and world best uniformities. Together with excellent reliability and high throughput, all these properties lead to a valuable device yield and a high uptime.

AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard of the German stock exchange (Deutsche Börse AG) and is included in the Dow Jones Sustainability Index World and the MSCI World Index.
 

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© AIXTRON AG, March 17, 2003

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