!!! Press Release !!!

Formosa Epitaxy Inc (FOREPI) advances towards a
bright future
with additional AIXTRON High-Temperature Production Tool

Aachen/Lung-Tan, Taoyuan, Taiwan, January 9, 2003 - AIXTRON, the world's leading supplier of CVD equipment for compound semiconductors has recently supplied Formosa Epitaxy Inc (FOREPI) with a further AIX 2600G3 HT MOCVD Planetary Reactor® with a capacity for 24x2" wafers. This system will additionally boost FOREPI's manufacturing capacities for high performance GaN based epitaxial wafers, chips and ultra-high-brightness LED chip related products.

Dr. Fen Ren Chien, President of FOREPI comments: "In view of the continuing high demand for LED's, we need a reliable system, one that can efficiently ramp-up our high volume manufacturing in a cost-efficient and highly professional manner. This is crucial for strategically positioning our products onto the booming UHB-LED market. According to our experienced judgement, and upon careful analysis of the market-place, we are convinced that only AIXTRON's system performance can fulfill the criteria best, to ensure our long-term success in today's dynamic and aggressive market." Dr. Bernd Schulte, Executive Vice President and COO of AIXTRON adds "FOREPI's repeated decision to invest in AIXTRON Systems, as opposed to other competing technologies, reflects the high level of satisfaction amongst our customers and highlights our long-term commitment to our customers. We look forward to future business opportunities with FOREPI to ensure their continued outstanding industry success."

The AIX 2600G3 HT, is the largest high temperature reactor for GaN-based materials available worldwide. The two-flow horizontal Planetary Reactor is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The unique reactor concept allows laminar gas flow without turbulence for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with high growth efficiency on multiple 2", 3" and 4" wafers is achieved through wafer rotation with the patented Gas Foil Rotation.

AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard of the German stock exchange (Deutsche Börse AG) and is included in the Dow Jones Sustainability Index World and the MSCI World Index.

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© AIXTRON AG, January 2003

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