ROHM SELECTS AIXTRON TECHNOLOGY FOR MASS PRODUCTION OF UHB LED

!!! Press Release !!!

ROHM SELECTS AIXTRON TECHNOLOGY FOR MASS PRODUCTION OF UHB LED

Aachen / Kyoto, Japan 28th October 2002 - ROHM Co, Ltd., one of the world-leading suppliers of opto-electronic devices, has recently purchased an AIXTRON MOCVD multi-wafer Planetary Reactor for LED production. AIXTRON's AIX 2600G3 high-volume system will enable ROHM to mass produce Ultra-High-Brightness LEDs based on AlGaInP layer structures.

ROHM has decided to purchase the AIX 2600G3 reactor after careful evaluation of the Capabilities of various reactors offered by MOVPE suppliers. A spokesperson of Rohm Co. Ltd. said: "We were impressed by the versatility, high up-time, growth efficiency and yield obtained with the AIX 2600 G3 system. It perfectly meets our requirements for flexibility and high productivity. In addition, with their Japan based subsidiary AIXTRON provides excellent customer service and support which we consider most important to minimize the time-to-market of our devices and to guarantee the highest level of quality for high-volume production."

The AIX 2400/26000G3 is the most versatile MOCVD system for 7x6", 8x4", 12x3" or 49x2" applications. The AIXTRON group offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor production systems for up to 25x4" or 7x6" wafers.

With an installed base of well over 650 systems world-wide, AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy and has been rated once more amongst the 2002 10 BEST in its category in the most recent VLSI Customer Satisfaction Survey. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fibre optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. The company has an extensive service and support network in over 15 countries. AIXTRON's many customers include Agere, Alcatel, Anritsu, ATMI, Avalon, AXT, Epson, Honeywell, Infineon, IQE, IQE Silicon Compounds, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Optospeed, Osram, Procomp, Samsung, Showa Denko, Siemens, ST Microelectronics, Sumitomo, Thales, UEC, VPEC as well as numerous Japanese corporations. AIXTRON systems have also been installed in the most renowned research institutes worldwide, including CNRS, Fraunhofer Institute, ITRI-OES, JPL, Meijo University, NDL Taiwan, Research Center Jülich, RIKEN, Sandia Nat Lab, Tsinghua University and the University of Tokyo. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide. AIXTRON AG (FSE: AIX ISIN DE0005066203) is included in the Dow Jones Sustainability Index World and the MSCI World Index.

For further information please contact:

Dr. Claus Ehrenbeck
Head of Investor Relations and
Corporate Communications
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 444
Fax: +49 241 8909 445
E-mail: invest@aixtron.com