EPITECH RELIES ONCE MORE ON AIXTRON'S PROVEN TECHNOLOGY

!!! Press Release !!!

EPITECH RELIES ONCE MORE ON AIXTRON'S PROVEN TECHNOLOGY
With Latest Order for AIX 2400G3 HT Mass Production Reactor

Aachen/Tainan, Taiwan, 21st October, 2002 - Epitech Technology Corporation has recently confirmed its decision to choose a further AIX 2400G3 HT mass production reactor for the production of Ultra-High Bright (UHB) InGaN LEDs. Founded in May 2000, Epitech Corporation focuses on the development and high-volume production of a wide spectrum of UHB-LED products. Since July 2002 Epitech has been engaged in the launching of mass production blue LEDs.

Dr. Simon (Shi-Ming) Chen, President of Epitech Corporation comments: "As a highly professional Epi-House already ISO 9001 certified, our main targets include becoming one of the main global players for UHB-LEDs and establishing and facilitating the manufacture of key opto-electronic and telecommunication products at our highly modern Fab facility here in Tainan Science Based Industrial Park. AIXTRON's Reactor is enabling us to achieve these goals." Dr. Bastian Marheineke, AIXTRON's Senior Department Manager, Sales Asia Pacific adds: "It is no secret that AIXTRON is the Price-Performance leader in the semiconductor industry. We are glad that Epitech is advancing its production capabilities using our tailor-suited technology."

The AIX 2400G3 HT reactor has a configuration of 11x2". The two-flow horizontal Planetary Reactor is recognized as the most widely used multiwafer MOCVD Reactor for compound semiconductor applications. The unique reactor concept allows laminar gas flow without turbulence for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with high growth efficiency and lowest particle contamination on multiple 2" or 3" wafers is achieved through wafer rotation with AIXTRON's patented Gas Foil Rotation.

With an installed base of well over 650 systems world-wide, AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy and has been rated once more amongst the 2002 10 BEST in its category in the most recent VLSI Customer Satisfaction Survey. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. The company has an extensive service and support network in over 15 countries. AIXTRON's many customers include Agere, Alcatel, Anritsu, ATMI, Avalon, AXT, Epson, Honeywell, Infineon, IQE, IQE Silicon Compounds, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Optospeed, Osram, Procomp, Samsung, Showa Denko, Siemens, ST Microelectronics, Sumitomo, Thales, UEC, VPEC as well as numerous Japanese corporations. AIXTRON systems have also been installed in the most renowned research institutes worldwide, including CNRS, Fraunhofer Institute, ITRI-OES, JPL, Meijo University, NDL Taiwan, Research Center Jülich, RIKEN, Sandia Nat Lab, Tsinghua University and the University of Tokyo. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide. AIXTRON AG (FSE: AIX ISIN DE0005066203) is included in the Dow Jones Sustainability Index World and the MSCI World Index.

For further information please contact:

Dr. Claus Ehrenbeck
Head of Investor Relations and
Corporate Communications
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 444
Fax: +49 241 8909 445
E-mail: invest@aixtron.com