FIRST AIXTRON AIX P60 DIAMOND PLASMA CVD SYSTEM SOLD TO TAIWAN

!!! Press Release !!!

FIRST AIXTRON AIX P60 DIAMOND PLASMA CVD SYSTEM
SOLD TO TAIWAN

Aachen/Hsinchu, 2nd September, 2002 - Light Chain Technology Co. Ltd., a start up company established in May 2001, based in Hsinshu, Taiwan, has recently ordered an AIX P60 Diamond Microwave CVD System for deposition of thin diamond films which can be used for diverse applications such as surface acoustic wave applications, high frequency wireless data transfer, thermal heat sink (e.g. for cooling high power LEDs/lasers) and for free-standing optical windows (thick diamond films approximately 0.5 - 3mm).

Mr. Ching-Tien Huang, General Manager of Light Chain Technology Co. Ltd. comments: "We are very much looking forward to working with the AIX P60. After careful consideration and market research, we are confident that AIXTRON was the right choice for us, providing a leading-edge technology production tool combined with a strong service support." Dr. Bernd Schulte, Executive Vice-President and COO of AIXTRON adds: "We are glad to see the success of our strategy to continue broadening the scope of our core competency and so reaching new application markets for our technology."

The ellipsoidal cavity reactors from AIXTRON guarantee intense, homogeneous and long-term stable plasma. Other features include a variable substrate size starting at 2"up to 6", state-of-the-art control and a monitoring system for all process and security relevant parameters. These reactors were developed by Professor Koidl's group at Fraunhofer Institute for Solid State Physics (IAF) in Freiburg, Germany. The P6 prototype was upscaled to the P60 and improved in the frame of the EU funded Projects MIRIAD and MEA PPNCD. The complete technology has been licensed by AIXTRON AG.

With an installed base of well over 650 systems world-wide, AIXTRON is, as verified by VLSI Research Inc., the world leading supplier of equipment for semiconductor epitaxy and has been rated once more amongst the 2002 10 BEST in its category in the most recent VLSI Customer Satisfaction Survey. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fibre optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signalling and lighting, as well as a range of other leading edge technologies. The company has an extensive service and support network in over 15 countries. AIXTRON's many customers include Agere, Alcatel, Anritsu, ATMI, Avalon, AXT, Epson, Honeywell, Infineon, IQE, IQE Silicon Compounds, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Optospeed, Osram, Procomp, Samsung, Showa Denko, Siemens, ST Microelectronics, Sumitomo, Thales, UEC, VPEC as well as numerous Japanese corporations. AIXTRON systems have also been installed in the most renowned research institutes worldwide, including CNRS, Fraunhofer Institute, ITRI-OES, JPL, Meijo University, NDL Taiwan, Research Center Jülich, RIKEN, Sandia Nat Lab, Tsinghua University and the University of Tokyo. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide. AIXTRON AG (FSE: AIX ISIN DE0005066203) is included in the Dow Jones Sustainability Index World and the MSCI World Index.

For further information please contact:

Dr. Claus Ehrenbeck
Head of Investor Relations and
Corporate Communications
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 444
Fax: +49 241 8909 445
E-mail: invest@aixtron.com