AIXTRON AND UDC PASS MOST CRITICAL MILESTONE IN OVPD PRODUCTION

!!! Press Release !!!

AIXTRON AND UDC PASS MOST CRITICAL MILESTONE IN OVPD PRODUCTION
TECHNOLOGY BY DEMONSTRATING FIRST OLEDS ON LARGE SCALE

Aachen May 20, 2002 - Following the successful installation of the AIXTRON OVPD Tricent® production tool for OLED displays at Universal Display Corp. (PANL, NasdaqNM), AIXTRON (FSE: AIX ISIN DE0005066203) is now proud to announce that the equipment has surprisingly passed in an extremely short time the first critical testing for OLED manufacturing on large scale mother glasses. The uniformity of blue, green and red OLED films surpassed the expectations and demonstrates the scaling success for Flat Panel Display (FPD) manufacturing, yielding very bright light emission across full 6 x 6 inch² panels.

Says Dr. Holger Juergensen, President CEO of AIXTRON, "this impressively demonstrates the 'proof of principle' of large scale OVPD as an enabling production technology for cost-efficient mass production of high-quality OLED displays. Now it is proven that OVPD is a disruptive technology for the other thin film technologies that were not in particular tailored and developed for cost efficient mass production of OLEDs for large scale FPD. Upon these great results, we have immediately initiated the next version OVPD equipment for Generation 2 Mother Glass applications."

Steve Abramson President and COO of UDC explains ""The strong strategic partnership between UDC and AIXTRON has resulted in very rapid progress in the commercialization of the OVPD Equipment for OLED displays. We are confident that by using AIXTRON's leading edge technology and UDC's advanced OVPD process the team will be able to continue to demonstrate outstanding results to meet the needs of OLED manufacturers."

Further details will be jointly released by UDC and AIXTRON during the SID conference which is taking place from 20.05 - 23.05.02 in Boston, MA, USA.

About AIXTRON - AIXTRON AG (FSE: AIX ISIN DE0005066203 ) is included in the Dow Jones Sustainability Index World and the MSCI World Index. As the world leading supplier of LED and semiconductor equipment with an installed base of well over 650 systems worldwide, according to VLSI Research Inc. AIXTRON is the forth largest semiconductor equipment manufacturer in Europe, with an extensive service and support network in over 15 countries. Its equipment is used by a diverse range of customers worldwide to manufacture the critical, advanced components such as OLEDs, LEDs, Lasers, Detectors, VCSELs , HBTs, PHEMTs, MESFETs, used in displays, illumination, signalling and lighting, fibre optic communications systems, wireless and mobile telephony applications, optical storage devices, and a range of other leading edge technologies. AIXTRON's many customers include Agere, Alcatel, Anritsu, ATMI, AXT, Epson, Honeywell, Infineon, IQE Silicon Compounds, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Osram, Samsung, Showa Denko, Siemens, ST Micro-electronics, Sumitomo, Thales, UEC, VPEC as well as numerous Japanese corporations. Visit AIXTRON on the Web at http://www.aixtron.com

For further information please contact:

Dr. Claus Ehrenbeck
Head of Investor Relations and
Corporate Communications
AIXTRON AG
Kackertstr. 15 - 17
D-52072 Aachen, Germany
Phone:+49 241 8909 444
Fax: +49 241 8909 445
E-mail: invest@aixtron.com