!!! Press Release !!!

AIXTRON AND MOCHEM INCREASE JOINT EFFORT TO TRANSFER GAINASN MATERIALS FASTER INTO PRODUCTION

Aachen, 12th November, 2001 - The increasing demand to reduce cost and improve quality of AIXTRON's proven production technology will be supported by a co-operation with MOCHEM. In March 2001 MOCHEM's EPI-PROOFTM-liquid group V precursor was qualified for AIXTRON Planetary Reactors®. Today the co-operation was expanded to liquid nitrogen precursors like VDMH. These precursors are e.g. used for dilute nitride materials (GaInAsN)- a class of materials that enables the production of novel electronic and optoelectronic devices. A qualification program is running in the Application Laboratories of MOCHEM (at the University of Marburg) and AIXTRON. Several European and Asian telecom companies were involved to transfer the jointly developed technology into production. Joint experimental pre-production work as well as theoretical investigation will be used to optimize the benefits of the AIXTRON Planetary Reactor®.

The AIXTRON Planetary Reactor® is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The reactor concept provides laminar gas flow without turbulences for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with unrivalled high growth efficiency on multiple 2, 3, 4 or 6 inch wafers is achieved through dual wafer rotation with the patented Gas Foil Rotation®. The focus of this joint development is on HBT (Heteropolar-Transistors) and advanced telecom laser for internet application which can benefit from the physical properties of the distributed III-V nitrogen containing materials. This proven and world wide unique co-operation satisfies the current requirements of the world market to generate new and more powerful electronic components at a lower cost.

With an installed base of well over 500 systems worldwide, AIXTRON is represented in over 15 countries. The company provides an extensive service and support network for maintenance as well as upgrading of systems. The high level of AIXTRON's service and the close relationship with its stakeholders is reflected in the VLSI Research Inc's Customer Satisfaction Survey, in which AIXTRON was once more among the 2001 10 BEST in its category and by the inclusion of the AIXTRON's shares in the Dow Jones Sustainability Index World. Among AIXTRON's list of industrial clients are names such as Agere, Alcatel, Anritsu, ATMI, Avalon, AXT, Epistar, EPSON, Honeywell, IQE, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Optospeed, Osram, Procomp, Samsung, Siemens, Showa Denko, Sumitomo, Thales, UEC, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world's most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, Research Center Jülich, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.

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© AIXTRON AG November 2001

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