!!! Press Release !!! AIXTRONS TRICENT®
TECHNOLOGY FOR 0.1 µM IT-CHIPS Aachen, October 18th, 2001 - ST Microelectronics, Bull, CEA Leti and Philips, as some of the major global players of European semiconductor industries, have started within an European research scheme (MEDEA) developing 0.1 µm Gate Stack technology based on AIXTRON Tricentâequipment for the manufacture of next generation integrated circuits. These sophisticated circuits require advanced deposition technologies for new materials. The need for precise metal and oxide deposition by CVD (chemical vapor deposition) can be solved by AIXTRON’s core know-how based on the Tricent® family of equipment and the HeteroWafer® Technology. The expected release date for the production of integrated circuits using the here developed AIXTRON technology is 2004. This is exactly on time for the market introduction of new and faster integrated circuits needed by the IT market. During the development phase which is taking place partly at ST Microelectronics in Crolles, France, and partly in AIXTRON’s Application Laboratory in Aachen, Germany, the already installed fully automated Tricentâ CVD equipment will be adapted to production requirements. Computer simulations of the equipment such as uniformity of the layers and cycle times as well as all chemical and physical process steps are used to understand and optimize the Tricentâ cluster tool. Prof. Dr. R. Waser of the Research Center Jülich, who is working as a subcontractor for AIXTRON, will use his well-known expertise and his sophisticated equipment to analyze the layers deposited at AIXTRON. Integrated circuits with 54 million transistors with critical dimensions below 100nm and 9km of internal connections will be fabricated with Tricent® equipment by the end of 2002 by the European consortium which consists altogether of 12 companies. "The German Ministry of Education and Research (BMBF) is funding the total efforts of AIXTRON which is €3.9 Mil. as one contribution to the MEDEA program" comments Dr. Tüngler, who is in charge of this promising project for the BMBF.
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