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Carbon Nanotube and Nanofiber Systems

 

Based on AIXTRON-Nanoinstruments’ unique plasma coupling technology, the “Black Magic” range of carbon nanotube/fiber systems are highly flexible and reproducible. Turnkey 2”, 4” and 6” systems, capable of carbon nanotube (singlewall/multiwall) and nanofiber deposition, are available with many advanced features for both, research and production. Larger wafer-size systems are currently under development.

 

Benefits

Our customers benefit from a wide range of advantages using the technology of Nanoinstruments:

  • High performance heater, fast ramp rates of 300°C/minute
  • Plasma or thermal CVD operation for ultimate flexibility in producing different types of nanotubes/fiber
  • Wafer temperature control by closed-loop infrared temperature sensors
  • Ease of use, automatic process control and remote system operation via TCP/IP or WiFi
  • Integrated reactor camera for safe process viewing
  • Excellent process and material reproducibility
  • Advanced system management features such as consumables tracking, action logs, real time parameter recording 
  • Options for in-situ mass spectroscopy, biasing,
    liquid delivery

 

 

 

 

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