Organic Vapor Phase Deposition

Break-Through Technology for OLED manufacturing

AIXTRON has introduced Organic Vapor Phase Deposition (OVPD) Equipment as the enabling technology for OLED display and organic semiconductor solutions. Based on more than 20 years experience in gas phase deposition techniques we have established a highly efficient technology for deposition of organic materials. Our world-class development team assures meeting market requirements and gaining the leading edge of high technologies such as OLED. We are enhancing our technology leadership with strong and renowned partners to complement our equipment expertise with full production process expertise.

OVPD is an innovative technology for the thin film deposition of small molecular organic materials. It utilizes the advantages of gas phase deposition, where the materials are transported to the substrate by an inert carrier gas.

AIXTRON combined its proprietary Close Coupled Showerhead (CCS) with the OVPD technology to accommodate mass production requirements. In collaboration with Universal Display Corp. (UDC) AIXTRON has developed and qualified OVPD production tools addressing the requirements of OLED manufacturing. AIXTRON today offers OVPD equipment for mass production as well as for R&D and pilot production.

OVPD  technology has been exclusively licensed to AIXTRON from Universal Display Corporation (UDC), Ewing, N.J. USA for equipment manufacture. OVPD technology is based on an invention by Professor Stephen R. Forrest et. al. at Princeton University, USA, which was exclusively licensed to UDC.

Key Benefits of OVPD Technology

The terms OVPD^® and Tricent^® are registered trademarks.